Abstract
Micro- and nano-scale manufacturing has been the subject of an increasing amount of interest and research effort worldwide in both academia and industry over the past 10 years.Traditional (MEMS) manufacturing, but also precision manufacturing technologies have been developed to cover micro-scale dimensions and accuracies. Furthermore, these fundamentally different technology ecosystems are currently combined in order to exploit strengths of both platforms. One example is the use of lithography-based technologies to establish nanostructures that are subsequently transferred to 3D geometries via injection molding.[...]
Original language | English |
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Article number | 297 |
Journal | Micromachines |
Volume | 8 |
Issue number | 10 |
Number of pages | 2 |
ISSN | 2072-666X |
DOIs | |
Publication status | Published - 2017 |