Abstract
The micromechanically produced microphone consists of a housing (1) wherein a transducer element (2) is placed and which has a sound inlet (3) on one side of the transducer element and a pressure compensation hole (4) on the other side. In order to protect the microphone against humidity, dust and dirt, which partly or totally will be able to destroy its characteristics, a sealing acoustic membrane (6, 7) is placed on each side of the transducer element. The transducer element can for example be a capacitive transducer with external bias or an electret based transducer. The microphone, which can be produced in very small dimension, is among other things suitable for use in hearing aids.
Original language | English |
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Patent number | WO1997001258 |
Filing date | 01/09/1997 |
Country/Territory | International Bureau of the World Intellectual Property Organization (WIPO) |
Publication status | Published - 1997 |