Micromachined double backplate differential capacitive                 microphone.

Jesper Bay, Ole Hansen, Siebe Bouwstra

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Journal of Micromechanics and Microengineering
Volume	9
Issue number	1
Pages (from-to)	30-33
ISSN	0960-1317
DOIs	https://doi.org/10.1088/0960-1317/9/1/003
Publication status	Published - 1999

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title = "Micromachined double backplate differential capacitive microphone.",

author = "Jesper Bay and Ole Hansen and Siebe Bouwstra",

year = "1999",

doi = "10.1088/0960-1317/9/1/003",

language = "English",

volume = "9",

pages = "30--33",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "1",

}

TY - JOUR

T1 - Micromachined double backplate differential capacitive microphone.

AU - Bay, Jesper

AU - Hansen, Ole

AU - Bouwstra, Siebe

PY - 1999

Y1 - 1999

U2 - 10.1088/0960-1317/9/1/003

DO - 10.1088/0960-1317/9/1/003

M3 - Journal article

SN - 0960-1317

VL - 9

SP - 30

EP - 33

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 1

ER -