Microfabrication of X-Ray grating for Talbot Interferometry

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Original language	English
Publication date	2017
Publication status	Published - 2017
Event	43rd International conference on Micro and Nano Engineering - Braga, Portugal Duration: 18 Sept 2017 → 22 Sept 2017 Conference number: 43

Conference	43rd International conference on Micro and Nano Engineering
Number	43
Country/Territory	Portugal
City	Braga
Period	18/09/2017 → 22/09/2017

Keywords

@conference{8481bbea1ac7436396302083b3668729,

title = "Microfabrication of X-Ray grating for Talbot Interferometry",

keywords = "X-ray gratings, Dry etching, Talbot interferometer",

author = "Chantal Silvestre and Bingdong Chang and Henri Jansen and Ole Hansen",

year = "2017",

language = "English",

note = "43rd International conference on Micro and Nano Engineering, MNE 2017 ; Conference date: 18-09-2017 Through 22-09-2017",

}

TY - ABST

T1 - Microfabrication of X-Ray grating for Talbot Interferometry

AU - Silvestre, Chantal

AU - Chang, Bingdong

AU - Jansen, Henri

AU - Hansen, Ole

N1 - Conference code: 43

PY - 2017

Y1 - 2017

KW - X-ray gratings

KW - Dry etching

KW - Talbot interferometer

M3 - Conference abstract for conference

T2 - 43rd International conference on Micro and Nano Engineering

Y2 - 18 September 2017 through 22 September 2017

ER -