Microfabrication of X-Ray grating for Talbot Interferometry

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    95 Downloads (Pure)
    Original languageEnglish
    Publication date2017
    Publication statusPublished - 2017
    Event43rd International conference on Micro and Nano Engineering - Braga, Portugal
    Duration: 18 Sep 201722 Sep 2017
    Conference number: 43

    Conference

    Conference43rd International conference on Micro and Nano Engineering
    Number43
    CountryPortugal
    CityBraga
    Period18/09/201722/09/2017

    Keywords

    • X-ray gratings
    • Dry etching
    • Talbot interferometer

    Cite this

    Silvestre, C., Chang, B., Jansen, H., & Hansen, O. (2017). Microfabrication of X-Ray grating for Talbot Interferometry. Abstract from 43rd International conference on Micro and Nano Engineering, Braga, Portugal.