Microfabricated photoplastic  cantilever with integrated  photoplastic/carbon  based piezoresistive  strain sensor

Lauge Gammelgaard; Peter Andreas Rasmussen; M. Calleja; P. Vettiger; Anja Boisen

doi:10.1063/1.2186396

Microfabricated photoplastic cantilever with integrated photoplastic/carbon based piezoresistive strain sensor

Lauge Gammelgaard, Peter Andreas Rasmussen, M. Calleja, P. Vettiger, Anja Boisen

Technical University of Denmark

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Abstract

We present an SU-8 micrometer sized cantilever strain sensor with an integrated piezoresistor made of a conductive composite of SU-8 polymer and carbon black particles. The composite has been developed using ultrasonic mixing. Cleanroom processing of the polymer composite has been investigated and it has been shown that it is possible to pattern the composite by standard UV photolithography. The composite material has been integrated into an SU-8 microcantilever and the polymer composite has been demonstrated to be piezoresistive with gauge factors around 15-20. Since SU-8 is much softer than silicon and the gauge factor of the composite material is relatively high, this polymer based strain sensor is more sensitive than a similar silicon based cantilever sensor. (c) 2006 American Institute of Physics.

Original language	English
Journal	Applied Physics Letters
Volume	88
Issue number	11
Pages (from-to)	113508
ISSN	0003-6951
DOIs	https://doi.org/10.1063/1.2186396
Publication status	Published - 2006

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Copyright (2006) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

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title = "Microfabricated photoplastic cantilever with integrated photoplastic/carbon based piezoresistive strain sensor",

abstract = "We present an SU-8 micrometer sized cantilever strain sensor with an integrated piezoresistor made of a conductive composite of SU-8 polymer and carbon black particles. The composite has been developed using ultrasonic mixing. Cleanroom processing of the polymer composite has been investigated and it has been shown that it is possible to pattern the composite by standard UV photolithography. The composite material has been integrated into an SU-8 microcantilever and the polymer composite has been demonstrated to be piezoresistive with gauge factors around 15-20. Since SU-8 is much softer than silicon and the gauge factor of the composite material is relatively high, this polymer based strain sensor is more sensitive than a similar silicon based cantilever sensor. (c) 2006 American Institute of Physics.",

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AU - Rasmussen, Peter Andreas

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AU - Vettiger, P.

AU - Boisen, Anja

N1 - Copyright (2006) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

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AB - We present an SU-8 micrometer sized cantilever strain sensor with an integrated piezoresistor made of a conductive composite of SU-8 polymer and carbon black particles. The composite has been developed using ultrasonic mixing. Cleanroom processing of the polymer composite has been investigated and it has been shown that it is possible to pattern the composite by standard UV photolithography. The composite material has been integrated into an SU-8 microcantilever and the polymer composite has been demonstrated to be piezoresistive with gauge factors around 15-20. Since SU-8 is much softer than silicon and the gauge factor of the composite material is relatively high, this polymer based strain sensor is more sensitive than a similar silicon based cantilever sensor. (c) 2006 American Institute of Physics.

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