@inproceedings{b782a3edcaaf40698b563f4ba664921f,
title = "Micro-uniformity during laser anneal : metrology and physics",
author = "W. Vandervorst and E. Rosseel and Rong Lin and Petersen, {Dirch Hjorth} and T. Clarysse and J. Goossens and P.F. Nielsen",
year = "2008",
language = "English",
isbn = "978-1-60511-040-0",
volume = "1070",
booktitle = "Proceedings of Materials Research Society",
publisher = "Materials Research Society",
note = "MRS Symposium Proceedings : Doping Engineering for Front-End Processing ; Conference date: 01-01-2008",
}