Micro-uniformity during laser anneal : metrology and physics

W. Vandervorst, E. Rosseel, Rong Lin, Dirch Hjorth Petersen, T. Clarysse, J. Goossens, P.F. Nielsen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of Materials Research Society : Doping Engineering for Front-End Processing
    Volume1070
    PublisherMaterials Research Society
    Publication date2008
    ISBN (Print)978-1-60511-040-0
    Publication statusPublished - 2008
    EventDoping Engineering for Front-End Processing: Materials Research Society 2008 - San Francisco, United States
    Duration: 25 Mar 200827 Mar 2008

    Conference

    ConferenceDoping Engineering for Front-End Processing
    Country/TerritoryUnited States
    CitySan Francisco
    Period25/03/200827/03/2008

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