Micro-uniformity during laser anneal : metrology and physics

W. Vandervorst; E. Rosseel; Rong Lin; Dirch Hjorth Petersen; T. Clarysse; J. Goossens; P.F. Nielsen

Micro-uniformity during laser anneal : metrology and physics

W. Vandervorst, E. Rosseel, Rong Lin, Dirch Hjorth Petersen, T. Clarysse, J. Goossens, P.F. Nielsen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of Materials Research Society : Doping Engineering for Front-End Processing
Volume	1070
Publisher	Materials Research Society
Publication date	2008
ISBN (Print)	978-1-60511-040-0
Publication status	Published - 2008
Event	Doping Engineering for Front-End Processing: Materials Research Society 2008 - San Francisco, United States Duration: 25 Mar 2008 → 27 Mar 2008

Conference

Conference	Doping Engineering for Front-End Processing
Country/Territory	United States
City	San Francisco
Period	25/03/2008 → 27/03/2008

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Cite this

@inproceedings{b782a3edcaaf40698b563f4ba664921f,

title = "Micro-uniformity during laser anneal : metrology and physics",

author = "W. Vandervorst and E. Rosseel and Rong Lin and Petersen, {Dirch Hjorth} and T. Clarysse and J. Goossens and P.F. Nielsen",

year = "2008",

language = "English",

isbn = "978-1-60511-040-0",

volume = "1070",

booktitle = "Proceedings of Materials Research Society",

publisher = "Materials Research Society",

note = "Doping Engineering for Front-End Processing : Materials Research Society 2008 ; Conference date: 25-03-2008 Through 27-03-2008",

}

Vandervorst, W, Rosseel, E, Lin, R, Petersen, DH, Clarysse, T, Goossens, J & Nielsen, PF 2008, Micro-uniformity during laser anneal : metrology and physics. in Proceedings of Materials Research Society: Doping Engineering for Front-End Processing. vol. 1070, Materials Research Society, Doping Engineering for Front-End Processing, San Francisco, California, United States, 25/03/2008.

TY - GEN

T1 - Micro-uniformity during laser anneal : metrology and physics

AU - Vandervorst, W.

AU - Rosseel, E.

AU - Lin, Rong

AU - Petersen, Dirch Hjorth

AU - Clarysse, T.

AU - Goossens, J.

AU - Nielsen, P.F.

PY - 2008

Y1 - 2008

M3 - Article in proceedings

SN - 978-1-60511-040-0

VL - 1070

BT - Proceedings of Materials Research Society

PB - Materials Research Society

T2 - Doping Engineering for Front-End Processing

Y2 - 25 March 2008 through 27 March 2008

ER -