Micro tools manufacturing for polymer replication with high aspect ratio structures using µEDM of silicon, selective etching and electroforming

Guido Tosello; Giuliano Bissacco; Peter Torben Tang; Hans Nørgaard Hansen; Peter Carøe Nielsen

Micro tools manufacturing for polymer replication with high aspect ratio structures using µEDM of silicon, selective etching and electroforming

Guido Tosello
, Giuliano Bissacco
, Peter Torben Tang
, Hans Nørgaard Hansen
, Peter Carøe Nielsen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST007)
Number of pages	314
Publication date	2007
Pages	43-44
Publication status	Published - 2007
Event	7^th International Workshop on High-Aspect-Ratio Micro-Structure Technology - Besancon, France Duration: 7 Jun 2007 → 9 Jun 2007 Conference number: 7

Workshop

Workshop	7^th International Workshop on High-Aspect-Ratio Micro-Structure Technology
Number	7
Country/Territory	France
City	Besancon
Period	07/06/2007 → 09/06/2007

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Cite this

@inproceedings{793634af610e4aa7a9f215d1a6b6d6e7,

title = "Micro tools manufacturing for polymer replication with high aspect ratio structures using µEDM of silicon, selective etching and electroforming",

author = "Guido Tosello and Giuliano Bissacco and Tang, \{Peter Torben\} and Hansen, \{Hans N{\o}rgaard\} and Nielsen, \{Peter Car{\o}e\}",

year = "2007",

language = "English",

pages = "43--44",

booktitle = "Proceedings of the 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST007)",

note = "7<sup>th</sup> International Workshop on High-Aspect-Ratio Micro-Structure Technology, HARMST2007 ; Conference date: 07-06-2007 Through 09-06-2007",

}

Tosello, G , Bissacco, G, Tang, PT, Hansen, HN & Nielsen, PC 2007, Micro tools manufacturing for polymer replication with high aspect ratio structures using µEDM of silicon, selective etching and electroforming. in Proceedings of the 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST007). pp. 43-44, 7^th International Workshop on High-Aspect-Ratio Micro-Structure Technology, Besancon, France, 07/06/2007.

Micro tools manufacturing for polymer replication with high aspect ratio structures using µEDM of silicon, selective etching and electroforming. / Tosello, Guido ; Bissacco, Giuliano; Tang, Peter Torben et al.
Proceedings of the 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST007). 2007. p. 43-44.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Micro tools manufacturing for polymer replication with high aspect ratio structures using µEDM of silicon, selective etching and electroforming

AU - Tosello, Guido

AU - Bissacco, Giuliano

AU - Tang, Peter Torben

AU - Hansen, Hans Nørgaard

AU - Nielsen, Peter Carøe

N1 - Conference code: 7

PY - 2007

Y1 - 2007

M3 - Article in proceedings

SP - 43

EP - 44

BT - Proceedings of the 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST007)

T2 - 7<sup>th</sup> International Workshop on High-Aspect-Ratio Micro-Structure Technology

Y2 - 7 June 2007 through 9 June 2007

ER -