Micro tools manufacturing for polymer replication with high aspect ratio structures using µEDM of silicon, selective etching and electroforming

Guido Tosello; Giuliano Bissacco; Peter Torben Tang; Hans Nørgaard Hansen; Peter Carøe Nielsen

Micro tools manufacturing for polymer replication with high aspect ratio structures using µEDM of silicon, selective etching and electroforming

Guido Tosello, Giuliano Bissacco, Peter Torben Tang, Hans Nørgaard Hansen, Peter Carøe Nielsen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST007)
Number of pages	314
Publication date	2007
Pages	43-44
Publication status	Published - 2007
Event	International Workshop on High-Aspect-Ratio Micro-Structure Technology - Besancon, France Duration: 1 Jan 2007 → … Conference number: 7th

Conference

Conference	International Workshop on High-Aspect-Ratio Micro-Structure Technology
Number	7th
City	Besancon, France
Period	01/01/2007 → …

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@inproceedings{793634af610e4aa7a9f215d1a6b6d6e7,

title = "Micro tools manufacturing for polymer replication with high aspect ratio structures using µEDM of silicon, selective etching and electroforming",

author = "Guido Tosello and Giuliano Bissacco and Tang, {Peter Torben} and Hansen, {Hans N{\o}rgaard} and Nielsen, {Peter Car{\o}e}",

year = "2007",

language = "English",

pages = "43--44",

booktitle = "Proceedings of the 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST007)",

note = "International Workshop on High-Aspect-Ratio Micro-Structure Technology, HARMST007 ; Conference date: 01-01-2007",

}

Tosello, G , Bissacco, G, Tang, PT, Hansen, HN & Nielsen, PC 2007, Micro tools manufacturing for polymer replication with high aspect ratio structures using µEDM of silicon, selective etching and electroforming. in Proceedings of the 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST007). pp. 43-44, International Workshop on High-Aspect-Ratio Micro-Structure Technology, Besancon, France, 01/01/2007.

Micro tools manufacturing for polymer replication with high aspect ratio structures using µEDM of silicon, selective etching and electroforming. / Tosello, Guido ; Bissacco, Giuliano; Tang, Peter Torben et al.
Proceedings of the 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST007). 2007. p. 43-44.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Micro tools manufacturing for polymer replication with high aspect ratio structures using µEDM of silicon, selective etching and electroforming

AU - Tosello, Guido

AU - Bissacco, Giuliano

AU - Tang, Peter Torben

AU - Hansen, Hans Nørgaard

AU - Nielsen, Peter Carøe

N1 - Conference code: 7th

PY - 2007

Y1 - 2007

M3 - Article in proceedings

SP - 43

EP - 44

BT - Proceedings of the 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST007)

T2 - International Workshop on High-Aspect-Ratio Micro-Structure Technology

Y2 - 1 January 2007

ER -