Micro probee carrier profiling of Ultra-shallow structures in advanced materials

T. Clarysse, A. Moussa, B. Parmentier, P. Eyben, B. Douhard, W. Vandervorst, P.F. Nielsen, Rong Lin, Dirch Hjorth Petersen, Fei Wang, Ole Hansen

Research output: Contribution to conferencePosterResearchpeer-review

Original languageEnglish
Publication date2010
Publication statusPublished - 2010
Event2010 MRS Spring Meeting & Exhibit - San Francisco, CA, United States
Duration: 5 Apr 20109 Apr 2010


Conference2010 MRS Spring Meeting & Exhibit
Country/TerritoryUnited States
CitySan Francisco, CA
Internet address

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