Micro probee carrier profiling of Ultra-shallow structures in advanced materials

T. Clarysse; A. Moussa; B. Parmentier; P. Eyben; B. Douhard; W. Vandervorst; P.F. Nielsen; Rong Lin; Dirch Hjorth Petersen; Fei Wang; Ole Hansen

Micro probee carrier profiling of Ultra-shallow structures in advanced materials

T. Clarysse, A. Moussa, B. Parmentier, P. Eyben, B. Douhard, W. Vandervorst, P.F. Nielsen, Rong Lin, Dirch Hjorth Petersen, Fei Wang, Ole Hansen

Research output: Contribution to conference › Poster › Research › peer-review

Original language	English
Publication date	2010
Publication status	Published - 2010
Event	2010 MRS Spring Meeting & Exhibit - San Francisco, CA, United States Duration: 5 Apr 2010 → 9 Apr 2010 http://www.mrs.org/spring2010/

Conference

Conference	2010 MRS Spring Meeting & Exhibit
Country/Territory	United States
City	San Francisco, CA
Period	05/04/2010 → 09/04/2010
Internet address	http://www.mrs.org/spring2010/

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title = "Micro probee carrier profiling of Ultra-shallow structures in advanced materials",

author = "T. Clarysse and A. Moussa and B. Parmentier and P. Eyben and B. Douhard and W. Vandervorst and P.F. Nielsen and Rong Lin and Petersen, {Dirch Hjorth} and Fei Wang and Ole Hansen",

year = "2010",

language = "English",

note = "2010 MRS Spring Meeting & Exhibit ; Conference date: 05-04-2010 Through 09-04-2010",

url = "http://www.mrs.org/spring2010/",

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TY - CONF

T1 - Micro probee carrier profiling of Ultra-shallow structures in advanced materials

AU - Clarysse, T.

AU - Moussa, A.

AU - Parmentier, B.

AU - Eyben, P.

AU - Douhard, B.

AU - Vandervorst, W.

AU - Nielsen, P.F.

AU - Lin, Rong

AU - Petersen, Dirch Hjorth

AU - Wang, Fei

AU - Hansen, Ole

PY - 2010

Y1 - 2010

M3 - Poster

T2 - 2010 MRS Spring Meeting & Exhibit

Y2 - 5 April 2010 through 9 April 2010

ER -