Micro-particle filter made in SU-8 for biomedical applications

Nadine-Nicole Noeth; Stephan Urs Keller; Stefanie Fetz; Oliver Geschke; Anja Boisen

doi:10.1109/SENSOR.2009.5285663

Micro-particle filter made in SU-8 for biomedical applications

Nadine-Nicole Noeth
, Stephan Urs Keller
, Stefanie Fetz
, Oliver Geschke
, Anja Boisen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

We have integrated a micro-particle filter in a polymer cantilever to filter micro-particles from a fluid while simultaneously measuring the amount of filtered particles. In a 3,8 mum thick SU-8 cantilever a filter was integrated with pore sizes between 3 and 30 mum. The chip was inserted in a microfluidic system and water with differently sized polystyrene beads was pumped through the filter. Particles which are larger than the pore sizes, cannot pass the filter and will increase the flow resistance of the cantilever. With more and more captured particles the cantilever starts to deflect, which can be detected by an optical read-out system.

Original language	English
Title of host publication	International Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009.
Publisher	IEEE
Publication date	2009
Pages	2034-2037
ISBN (Print)	978-1-4244-4190-7
DOIs	https://doi.org/10.1109/SENSOR.2009.5285663
Publication status	Published - 2009
Event	15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009) - Denver,CO, United States Duration: 21 Jun 2009 → 25 Jun 2009 Conference number: 15

Conference

Conference	15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009)
Number	15
Country/Territory	United States
City	Denver,CO
Period	21/06/2009 → 25/06/2009

Bibliographical note

Copyright: 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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@inproceedings{99278ae27c714dd2b3ae69fe1a018743,

title = "Micro-particle filter made in SU-8 for biomedical applications",

abstract = "We have integrated a micro-particle filter in a polymer cantilever to filter micro-particles from a fluid while simultaneously measuring the amount of filtered particles. In a 3,8 mum thick SU-8 cantilever a filter was integrated with pore sizes between 3 and 30 mum. The chip was inserted in a microfluidic system and water with differently sized polystyrene beads was pumped through the filter. Particles which are larger than the pore sizes, cannot pass the filter and will increase the flow resistance of the cantilever. With more and more captured particles the cantilever starts to deflect, which can be detected by an optical read-out system.",

author = "Nadine-Nicole Noeth and Keller, \{Stephan Urs\} and Stefanie Fetz and Oliver Geschke and Anja Boisen",

note = "Copyright: 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE; 15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009), Transducers 2009 ; Conference date: 21-06-2009 Through 25-06-2009",

year = "2009",

doi = "10.1109/SENSOR.2009.5285663",

language = "English",

isbn = "978-1-4244-4190-7",

pages = "2034--2037",

booktitle = "International Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009.",

publisher = "IEEE",

address = "United States",

}

Noeth, N-N, Keller, SU, Fetz, S, Geschke, O & Boisen, A 2009, Micro-particle filter made in SU-8 for biomedical applications. in International Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009.. IEEE, pp. 2034-2037, 15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009), Denver,CO, United States, 21/06/2009. https://doi.org/10.1109/SENSOR.2009.5285663

Micro-particle filter made in SU-8 for biomedical applications. / Noeth, Nadine-Nicole; Keller, Stephan Urs; Fetz, Stefanie et al.
International Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009.. IEEE, 2009. p. 2034-2037.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Micro-particle filter made in SU-8 for biomedical applications

AU - Noeth, Nadine-Nicole

AU - Keller, Stephan Urs

AU - Fetz, Stefanie

AU - Geschke, Oliver

AU - Boisen, Anja

N1 - Conference code: 15

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N2 - We have integrated a micro-particle filter in a polymer cantilever to filter micro-particles from a fluid while simultaneously measuring the amount of filtered particles. In a 3,8 mum thick SU-8 cantilever a filter was integrated with pore sizes between 3 and 30 mum. The chip was inserted in a microfluidic system and water with differently sized polystyrene beads was pumped through the filter. Particles which are larger than the pore sizes, cannot pass the filter and will increase the flow resistance of the cantilever. With more and more captured particles the cantilever starts to deflect, which can be detected by an optical read-out system.

AB - We have integrated a micro-particle filter in a polymer cantilever to filter micro-particles from a fluid while simultaneously measuring the amount of filtered particles. In a 3,8 mum thick SU-8 cantilever a filter was integrated with pore sizes between 3 and 30 mum. The chip was inserted in a microfluidic system and water with differently sized polystyrene beads was pumped through the filter. Particles which are larger than the pore sizes, cannot pass the filter and will increase the flow resistance of the cantilever. With more and more captured particles the cantilever starts to deflect, which can be detected by an optical read-out system.

U2 - 10.1109/SENSOR.2009.5285663

DO - 10.1109/SENSOR.2009.5285663

M3 - Article in proceedings

SN - 978-1-4244-4190-7

SP - 2034

EP - 2037

BT - International Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009.

PB - IEEE

T2 - 15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009)

Y2 - 21 June 2009 through 25 June 2009

ER -

Micro-particle filter made in SU-8 for biomedical applications

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