Micro-particle filter made in SU-8 for biomedical applications

Nadine-Nicole Noeth, Stephan Urs Keller, Stefanie Fetz, Oliver Geschke, Anja Boisen

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    Abstract

    We have integrated a micro-particle filter in a polymer cantilever to filter micro-particles from a fluid while simultaneously measuring the amount of filtered particles. In a 3,8 mum thick SU-8 cantilever a filter was integrated with pore sizes between 3 and 30 mum. The chip was inserted in a microfluidic system and water with differently sized polystyrene beads was pumped through the filter. Particles which are larger than the pore sizes, cannot pass the filter and will increase the flow resistance of the cantilever. With more and more captured particles the cantilever starts to deflect, which can be detected by an optical read-out system.
    Original languageEnglish
    Title of host publicationInternational Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009.
    PublisherIEEE
    Publication date2009
    Pages2034-2037
    ISBN (Print)978-1-4244-4190-7
    DOIs
    Publication statusPublished - 2009
    Event15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009) - Denver,CO, United States
    Duration: 21 Jun 200925 Jun 2009
    Conference number: 15

    Conference

    Conference15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009)
    Number15
    CountryUnited States
    CityDenver,CO
    Period21/06/200925/06/2009

    Bibliographical note

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