Micro-particle filter made in SU-8 for biomedical applications

Nadine-Nicole Noeth, Stephan Urs Keller, Stefanie Fetz, Oliver Geschke, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    2354 Downloads (Pure)


    We have integrated a micro-particle filter in a polymer cantilever to filter micro-particles from a fluid while simultaneously measuring the amount of filtered particles. In a 3,8 mum thick SU-8 cantilever a filter was integrated with pore sizes between 3 and 30 mum. The chip was inserted in a microfluidic system and water with differently sized polystyrene beads was pumped through the filter. Particles which are larger than the pore sizes, cannot pass the filter and will increase the flow resistance of the cantilever. With more and more captured particles the cantilever starts to deflect, which can be detected by an optical read-out system.
    Original languageEnglish
    Title of host publicationInternational Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009.
    Publication date2009
    ISBN (Print)978-1-4244-4190-7
    Publication statusPublished - 2009
    Event15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009) - Denver,CO, United States
    Duration: 21 Jun 200925 Jun 2009
    Conference number: 15


    Conference15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009)
    CountryUnited States

    Bibliographical note

    Copyright: 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

    Fingerprint Dive into the research topics of 'Micro-particle filter made in SU-8 for biomedical applications'. Together they form a unique fingerprint.

    Cite this