Micro Hall effect metrology

Dirch Hjorth Petersen; Ole Hansen; Fei Wang; Frederik Westergaard Østerberg; Henrik Hartmann Henrichsen; Peter Bøggild; Rong Lin; Peter Folmer Nielsen; T. Clarysse; E.  Rosseel; W.  Vandervorst

Micro Hall effect metrology

Dirch Hjorth Petersen, Ole Hansen, Fei Wang, Frederik Westergaard Østerberg, Henrik Hartmann Henrichsen, Peter Bøggild, Rong Lin, Peter Folmer Nielsen, T. Clarysse, E. Rosseel, W. Vandervorst

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

Original language	English
Publication date	2012
Number of pages	1
Publication status	Published - 2012
Event	International Conference on Ion Implantation Technology - Valladolid, Spain Duration: 25 Jun 2012 → 29 Jun 2012 Conference number: 19th

Conference

Conference	International Conference on Ion Implantation Technology
Number	19th
Country/Territory	Spain
City	Valladolid
Period	25/06/2012 → 29/06/2012

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@conference{869c965753534c389aa77585f4094db3,

title = "Micro Hall effect metrology",

author = "Petersen, {Dirch Hjorth} and Ole Hansen and Fei Wang and {\O}sterberg, {Frederik Westergaard} and Henrichsen, {Henrik Hartmann} and Peter B{\o}ggild and Rong Lin and Nielsen, {Peter Folmer} and T. Clarysse and E. Rosseel and W. Vandervorst",

year = "2012",

language = "English",

note = "International Conference on Ion Implantation Technology ; Conference date: 25-06-2012 Through 29-06-2012",

}

TY - ABST

T1 - Micro Hall effect metrology

AU - Petersen, Dirch Hjorth

AU - Hansen, Ole

AU - Wang, Fei

AU - Østerberg, Frederik Westergaard

AU - Henrichsen, Henrik Hartmann

AU - Bøggild, Peter

AU - Lin, Rong

AU - Nielsen, Peter Folmer

AU - Clarysse, T.

AU - Rosseel, E.

AU - Vandervorst, W.

N1 - Conference code: 19th

PY - 2012

Y1 - 2012

M3 - Conference abstract for conference

T2 - International Conference on Ion Implantation Technology

Y2 - 25 June 2012 through 29 June 2012

ER -