Micro Hall effect metrology

Dirch Hjorth Petersen, Ole Hansen, Fei Wang, Frederik Westergaard Østerberg, Henrik Hartmann Henrichsen, Peter Bøggild, Rong Lin, Peter Folmer Nielsen, T. Clarysse, E. Rosseel, W. Vandervorst

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

Original languageEnglish
Publication date2012
Number of pages1
Publication statusPublished - 2012
EventInternational Conference on Ion Implantation Technology - Valladolid, Spain
Duration: 25 Jun 201229 Jun 2012
Conference number: 19th


ConferenceInternational Conference on Ion Implantation Technology

Cite this

Petersen, D. H., Hansen, O., Wang, F., Østerberg, F. W., Henrichsen, H. H., Bøggild, P., ... Vandervorst, W. (2012). Micro Hall effect metrology. Abstract from International Conference on Ion Implantation Technology, Valladolid, Spain.