Micro Four-Point Probe with High Spatial Resolution for Ion Implantation and Ultra-Shallow Junction Characterization

Daniel Kjær, Rong Lin, Dirch Hjorth Petersen, Petros M. Kopalidis, Ronald Eddy, David A. Walker, William F. Egelhoff, Larry Pickert

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationAIP Conference Proceedings
    Number of pages167
    PublisherAmerican Institute of Physics
    Publication date2008
    Edition1066
    Publication statusPublished - 2008
    EventAIP -
    Duration: 1 Jan 2008 → …

    Conference

    ConferenceAIP
    Period01/01/2008 → …

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