Micro Four-Point Probe and Micro Hall Effect: Methods for Reliable Electrical Characterization of Ultra-Shallow Junctions

    Research output: Book/ReportPh.D. thesisResearch

    1054 Downloads (Pure)
    Original languageEnglish
    PublisherTechnical University of Denmark
    Number of pages64
    Publication statusPublished - 2009


    Advanced Characterization of Semiconductors using Microprobes

    Petersen, D. H., Bøggild, P., Nielsen, P. F., Vandervorst, W., Thomsen, E. V., Hofmann, P., Koon, D. W. & Hansen, O.

    DTU, Samfinansiering


    Project: PhD

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