Micro Four-Point Probe and Micro Hall Effect: Methods for Reliable Electrical Characterization of Ultra-Shallow Junctions

Dirch Hjorth Petersen

Research output: Book/Report › Ph.D. thesis

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Original language	English

Publisher	Technical University of Denmark
Number of pages	64
Publication status	Published - 2009

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Advanced Characterization of Semiconductors using Microprobes
Petersen, D. H. (PhD Student), Bøggild, P. (Main Supervisor), Nielsen, P. F. (Supervisor), Vandervorst, W. (Supervisor), Thomsen, E. V. (Examiner), Hofmann, P. (Examiner), Koon, D. W. (Examiner) & Hansen, O. (Supervisor)
DTU, Samfinansiering
15/12/2006 → 20/01/2010
Project: PhD

TY - BOOK

T1 - Micro Four-Point Probe and Micro Hall Effect: Methods for Reliable Electrical Characterization of Ultra-Shallow Junctions

AU - Petersen, Dirch Hjorth

PY - 2009

Y1 - 2009

M3 - Ph.D. thesis

BT - Micro Four-Point Probe and Micro Hall Effect: Methods for Reliable Electrical Characterization of Ultra-Shallow Junctions

PB - Technical University of Denmark

ER -