Micro Four-point Probe: a Novel Tool for Measuring the
                Conductivity of Surfaces at the Micron Scale.

Peter Bøggild; Torben Mikael Hansen; C.L. Petersen; Francois Grey; T. Hassenkam; T. Bjørnholm; I. Shiraki; S. Hasegawa

Micro Four-point Probe: a Novel Tool for Measuring the Conductivity of Surfaces at the Micron Scale.

Peter Bøggild
, Torben Mikael Hansen
, C.L. Petersen
, Francois Grey
, T. Hassenkam
, T. Bjørnholm
, I. Shiraki
, S. Hasegawa

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Micro Four-point Probe: a Novel Tool for Measuring the Conductivity of Surfaces at the Micron Scale.
Publisher	Japan Society for Precision Engineering
Publication date	1999
Pages	832-836
Publication status	Published - 1999
Event	Proc.of the 9th ICPE, Precision Science and Technology for Perfect Surfaces - Duration: 1 Jan 1999 → …

Conference

Conference	Proc.of the 9th ICPE, Precision Science and Technology for Perfect Surfaces
Period	01/01/1999 → …

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Cite this

Bøggild, P., Hansen, T. M., Petersen, C. L., Grey, F., Hassenkam, T., Bjørnholm, T., Shiraki, I., & Hasegawa, S. (1999). Micro Four-point Probe: a Novel Tool for Measuring the Conductivity of Surfaces at the Micron Scale. In Micro Four-point Probe: a Novel Tool for Measuring the Conductivity of Surfaces at the Micron Scale. (pp. 832-836). Japan Society for Precision Engineering.

@inproceedings{4e669a3c2dee430fa42fa5717f087bf1,

title = "Micro Four-point Probe: a Novel Tool for Measuring the Conductivity of Surfaces at the Micron Scale.",

author = "Peter B{\o}ggild and Hansen, \{Torben Mikael\} and C.L. Petersen and Francois Grey and T. Hassenkam and T. Bj{\o}rnholm and I. Shiraki and S. Hasegawa",

year = "1999",

language = "English",

pages = "832--836",

booktitle = "Micro Four-point Probe: a Novel Tool for Measuring the Conductivity of Surfaces at the Micron Scale.",

publisher = "Japan Society for Precision Engineering",

note = "Proc.of the 9th ICPE, Precision Science and Technology for Perfect Surfaces ; Conference date: 01-01-1999",

}

Bøggild, P, Hansen, TM, Petersen, CL, Grey, F, Hassenkam, T, Bjørnholm, T, Shiraki, I & Hasegawa, S 1999, Micro Four-point Probe: a Novel Tool for Measuring the Conductivity of Surfaces at the Micron Scale. in Micro Four-point Probe: a Novel Tool for Measuring the Conductivity of Surfaces at the Micron Scale.. Japan Society for Precision Engineering, pp. 832-836, Proc.of the 9th ICPE, Precision Science and Technology for Perfect Surfaces, 01/01/1999.

Micro Four-point Probe: a Novel Tool for Measuring the Conductivity of Surfaces at the Micron Scale. / Bøggild, Peter; Hansen, Torben Mikael; Petersen, C.L. et al.
Micro Four-point Probe: a Novel Tool for Measuring the Conductivity of Surfaces at the Micron Scale.. Japan Society for Precision Engineering, 1999. p. 832-836.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Micro Four-point Probe: a Novel Tool for Measuring the Conductivity of Surfaces at the Micron Scale.

AU - Bøggild, Peter

AU - Hansen, Torben Mikael

AU - Petersen, C.L.

AU - Grey, Francois

AU - Hassenkam, T.

AU - Bjørnholm, T.

AU - Shiraki, I.

AU - Hasegawa, S.

PY - 1999

Y1 - 1999

M3 - Article in proceedings

SP - 832

EP - 836

BT - Micro Four-point Probe: a Novel Tool for Measuring the Conductivity of Surfaces at the Micron Scale.

PB - Japan Society for Precision Engineering

T2 - Proc.of the 9th ICPE, Precision Science and Technology for Perfect Surfaces

Y2 - 1 January 1999

ER -

Bøggild P, Hansen TM, Petersen CL, Grey F, Hassenkam T, Bjørnholm T et al. Micro Four-point Probe: a Novel Tool for Measuring the Conductivity of Surfaces at the Micron Scale. In Micro Four-point Probe: a Novel Tool for Measuring the Conductivity of Surfaces at the Micron Scale.. Japan Society for Precision Engineering. 1999. p. 832-836