Micro-cantilevers for non-destructive characterization of nanograss uniformity

Dirch Hjorth Petersen, Fei Wang, Mikkel Buster Olesen, Rafal Wierzbicki, Michael Stenbæk Schmidt, Peter F. Nielsen, Peter Bøggild, Ole Hansen, Kristian Mølhave

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Abstract

    We demonstrate an application of three-way flexible micro four-point probes for indirect uniformity characterization of surface morphology. The mean sheet conductance of a quasi-planar 3D nanostructured surface is highly dependent on the surface morphology, and thus accurate sheet conductance measurements may be useful for process uniformity characterization. The method is applied for characterization of TiW coated nanograss uniformity. Three-way flexible L-shaped cantilever electrodes are used to avoid damage to the fragile surface, and a relative standard deviation on measurement repeatability of 0.12 % is obtained with a measurement yield of 97%. Finally, variations in measured sheet conductance are correlated to the surface morphology as characterized by electron microscopy.
    Original languageEnglish
    Title of host publication16th International Solid-State Sensors, Actuators and Microsystems Conference
    PublisherIEEE
    Publication date2011
    ISBN (Print)978-1-4577-0157-3
    DOIs
    Publication statusPublished - 2011
    Event16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China
    Duration: 5 Jun 20119 Jun 2011
    Conference number: 16
    http://www.transducers11-beijing.org/

    Conference

    Conference16th International Solid-State Sensors, Actuators and Microsystems Conference
    Number16
    CountryChina
    CityBeijing
    Period05/06/201109/06/2011
    Internet address

    Keywords

    • Sensitivity
    • Surface treatment
    • Surface morphology
    • Morphology
    • Electrodes
    • Probes
    • Contacts

    Fingerprint Dive into the research topics of 'Micro-cantilevers for non-destructive characterization of nanograss uniformity'. Together they form a unique fingerprint.

    Cite this