Micro-cantilevers for non-destructive characterization of nanograss uniformity

Dirch Hjorth Petersen; Fei Wang; Mikkel Buster Olesen; Rafal Wierzbicki; Michael Stenbæk Schmidt; Peter F. Nielsen; Peter Bøggild; Ole Hansen; Kristian Mølhave

doi:10.1109/TRANSDUCERS.2011.5969173

Micro-cantilevers for non-destructive characterization of nanograss uniformity

Dirch Hjorth Petersen, Fei Wang, Mikkel Buster Olesen, Rafal Wierzbicki, Michael Stenbæk Schmidt, Peter F. Nielsen, Peter Bøggild, Ole Hansen, Kristian Mølhave

CAPRES A/S

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

We demonstrate an application of three-way flexible micro four-point probes for indirect uniformity characterization of surface morphology. The mean sheet conductance of a quasi-planar 3D nanostructured surface is highly dependent on the surface morphology, and thus accurate sheet conductance measurements may be useful for process uniformity characterization. The method is applied for characterization of TiW coated nanograss uniformity. Three-way flexible L-shaped cantilever electrodes are used to avoid damage to the fragile surface, and a relative standard deviation on measurement repeatability of 0.12 % is obtained with a measurement yield of 97%. Finally, variations in measured sheet conductance are correlated to the surface morphology as characterized by electron microscopy.

Original language	English
Title of host publication	16th International Solid-State Sensors, Actuators and Microsystems Conference
Publisher	IEEE
Publication date	2011
ISBN (Print)	978-1-4577-0157-3
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969173
Publication status	Published - 2011
Event	16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011 Conference number: 16 http://www.transducers11-beijing.org/

Conference

Conference	16th International Solid-State Sensors, Actuators and Microsystems Conference
Number	16
Country/Territory	China
City	Beijing
Period	05/06/2011 → 09/06/2011
Internet address	http://www.transducers11-beijing.org/

Keywords

Sensitivity
Surface treatment
Surface morphology
Morphology
Electrodes
Probes
Contacts

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10.1109/TRANSDUCERS.2011.5969173

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title = "Micro-cantilevers for non-destructive characterization of nanograss uniformity",

abstract = "We demonstrate an application of three-way flexible micro four-point probes for indirect uniformity characterization of surface morphology. The mean sheet conductance of a quasi-planar 3D nanostructured surface is highly dependent on the surface morphology, and thus accurate sheet conductance measurements may be useful for process uniformity characterization. The method is applied for characterization of TiW coated nanograss uniformity. Three-way flexible L-shaped cantilever electrodes are used to avoid damage to the fragile surface, and a relative standard deviation on measurement repeatability of 0.12 % is obtained with a measurement yield of 97%. Finally, variations in measured sheet conductance are correlated to the surface morphology as characterized by electron microscopy.",

keywords = "Sensitivity, Surface treatment, Surface morphology, Morphology, Electrodes, Probes, Contacts",

author = "Petersen, {Dirch Hjorth} and Fei Wang and Olesen, {Mikkel Buster} and Rafal Wierzbicki and Schmidt, {Michael Stenb{\ae}k} and Nielsen, {Peter F.} and Peter B{\o}ggild and Ole Hansen and Kristian M{\o}lhave",

year = "2011",

doi = "10.1109/TRANSDUCERS.2011.5969173",

language = "English",

isbn = "978-1-4577-0157-3",

booktitle = "16th International Solid-State Sensors, Actuators and Microsystems Conference",

publisher = "IEEE",

address = "United States",

note = "16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

url = "http://www.transducers11-beijing.org/",

}

Petersen, DH, Wang, F, Olesen, MB, Wierzbicki, R, Schmidt, MS, Nielsen, PF, Bøggild, P , Hansen, O & Mølhave, K 2011, Micro-cantilevers for non-destructive characterization of nanograss uniformity. in 16th International Solid-State Sensors, Actuators and Microsystems Conference. IEEE, 16th International Solid-State Sensors, Actuators and Microsystems Conference, Beijing, China, 05/06/2011. https://doi.org/10.1109/TRANSDUCERS.2011.5969173

TY - GEN

T1 - Micro-cantilevers for non-destructive characterization of nanograss uniformity

AU - Petersen, Dirch Hjorth

AU - Wang, Fei

AU - Olesen, Mikkel Buster

AU - Wierzbicki, Rafal

AU - Schmidt, Michael Stenbæk

AU - Nielsen, Peter F.

AU - Bøggild, Peter

AU - Hansen, Ole

AU - Mølhave, Kristian

N1 - Conference code: 16

PY - 2011

Y1 - 2011

N2 - We demonstrate an application of three-way flexible micro four-point probes for indirect uniformity characterization of surface morphology. The mean sheet conductance of a quasi-planar 3D nanostructured surface is highly dependent on the surface morphology, and thus accurate sheet conductance measurements may be useful for process uniformity characterization. The method is applied for characterization of TiW coated nanograss uniformity. Three-way flexible L-shaped cantilever electrodes are used to avoid damage to the fragile surface, and a relative standard deviation on measurement repeatability of 0.12 % is obtained with a measurement yield of 97%. Finally, variations in measured sheet conductance are correlated to the surface morphology as characterized by electron microscopy.

AB - We demonstrate an application of three-way flexible micro four-point probes for indirect uniformity characterization of surface morphology. The mean sheet conductance of a quasi-planar 3D nanostructured surface is highly dependent on the surface morphology, and thus accurate sheet conductance measurements may be useful for process uniformity characterization. The method is applied for characterization of TiW coated nanograss uniformity. Three-way flexible L-shaped cantilever electrodes are used to avoid damage to the fragile surface, and a relative standard deviation on measurement repeatability of 0.12 % is obtained with a measurement yield of 97%. Finally, variations in measured sheet conductance are correlated to the surface morphology as characterized by electron microscopy.

KW - Sensitivity

KW - Surface treatment

KW - Surface morphology

KW - Morphology

KW - Electrodes

KW - Probes

KW - Contacts

U2 - 10.1109/TRANSDUCERS.2011.5969173

DO - 10.1109/TRANSDUCERS.2011.5969173

M3 - Article in proceedings

SN - 978-1-4577-0157-3

BT - 16th International Solid-State Sensors, Actuators and Microsystems Conference

PB - IEEE

T2 - 16th International Solid-State Sensors, Actuators and Microsystems Conference

Y2 - 5 June 2011 through 9 June 2011

ER -

Micro-cantilevers for non-destructive characterization of nanograss uniformity

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Keywords

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