Micro-calorimetric sensor for vapor phase explosive detection with optimized heat profile

Anders Greve, J. Olsen, N. Privorotskaya, L. Senesac, T. Thundat, W. P. King, Anja Boisen

    Research output: Contribution to journalJournal articlepeer-review

    Abstract

    A heater design, used in a micro-calorimetric sensor, has been optimized for temperature uniformity in order to increase the sensitivity and reliability of detection of trace amounts of explosives. In this abstract the design, fabrication and characterization is described. The performance of the novel heater design is characterized by measuring the temperature coefficient of resistivity (TCR) values and by mapping the temperature distribution using Raman spectroscopy. The new heater design is seen to have increased the temperature uniformity by a factor of 2.3.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume87
    Issue number5-8
    Pages (from-to)696-698
    ISSN0167-9317
    DOIs
    Publication statusPublished - 2010

    Keywords

    • Calorimetry
    • Micro-heater
    • Explosive detection

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