Micro-calorimetric sensor for vapor phase explosive detection with optimized heat profile

Anders Greve, J. Olsen, N. Privorotskaya, L. Senesac, T. Thundat, W. P. King, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review


    A heater design, used in a micro-calorimetric sensor, has been optimized for temperature uniformity in order to increase the sensitivity and reliability of detection of trace amounts of explosives. In this abstract the design, fabrication and characterization is described. The performance of the novel heater design is characterized by measuring the temperature coefficient of resistivity (TCR) values and by mapping the temperature distribution using Raman spectroscopy. The new heater design is seen to have increased the temperature uniformity by a factor of 2.3.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Issue number5-8
    Pages (from-to)696-698
    Publication statusPublished - 2010


    • Calorimetry
    • Micro-heater
    • Explosive detection


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