Methods for Fabrication of Released Nickel Comb-Drive Devices on CMOS

Arda Deniz Yalcinkaya, Jan Tue Ravnkilde, L.S. Johansen, Ole Hansen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Digest of Technical Papers, Springer-Verlag Transducers
Publication date	2001
Pages	600-603
Publication status	Published - 2001

OpenUrl availability

@inproceedings{c7f3d7da365a4a2aaa2f9af86464e7e4,

title = "Methods for Fabrication of Released Nickel Comb-Drive Devices on CMOS",

author = "Yalcinkaya, {Arda Deniz} and Ravnkilde, {Jan Tue} and L.S. Johansen and Ole Hansen",

year = "2001",

language = "English",

pages = "600--603",

booktitle = "Digest of Technical Papers, Springer-Verlag Transducers",

}