Method of Thermocleaving a Polymer Layer

A method of thermocleaving a thermocleavable polymer layer which is in thermal contact with a heat sensitive component that is not tolerant of the temperature required for thermocleavage of the thermocleavable polymer layer, in which the thermocleavable polymer layer is illuminated with a light source having a wavelength range more strongly absorbed by the thermocleavable polymer and substantially less strongly absorbed by the heat sensitive component, such that the thermocleavable polymer layer reaches a temperature sufficient to cause thermocleavage of the polymer without causing detrimental heating to the heat sensitive component. Further provided is apparatus for carrying out the above method.