A method of obtaining an electrical property of a test sample, comprising a non-conductive area and a conductive or semi-conductive test area, byperforming multiple measurements using a multi-point probe. The method comprising the steps of providing a magnetic field having field lines passing perpendicularly through the test area, bringing the probe into a first position on the test area, the conductive tips of the probe being in contact with the test area, determining a position for each tip relative to the boundary between the non- conductive area and the test area, determining distances between each tip, selecting one tip to be a current source positioned between conductive tips being used for determining a voltage in the test sample, performing a first measurement, moving the probe and performing a second measurement, calculating on the basis of the first and second measurement the electrical property of the test area.
|Publication status||Published - 2010|
Bibliographical noteInternational application published under the World Intellectual Property Organization (WIPO).
Also published as: WO2009030230, KR20100049098, JP2010540890, IL203966, EP2198316, CN101821638, and CN101821638.