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Method and device for nanoimprint lithography

  • Kristian Smistrup (Inventor)
  • , Tobias Hedegaard (Inventor)
  • , Ole Hansen (Inventor)

    Research output: Patent

    Original languageEnglish
    Patent numberWO 2011050817
    Filing date05/05/2011
    Country/TerritoryInternational Bureau of the World Intellectual Property Organization (WIPO)
    Publication statusPublished - 2011

    Bibliographical note

    Francaise: Procede et dispositif pour lithographie a nano-impression

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