Metallization of high aspect ratio, out of plane structures

Patricia Vazquez; Maria Dimaki; Winnie Edith Svendsen

doi:10.1109/IWASI.2009.5184794

Metallization of high aspect ratio, out of plane structures

Patricia Vazquez, Maria Dimaki, Winnie Edith Svendsen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

This work is dedicated to developing a novel three dimensional structure for electrochemical measurements in neuronal studies. The final prototype will allow not only for the study and culture on chip of neuronal cells, but also of brain tissue. The use of out-of-plane electrodes instead of planar ones increases the sensitivity of the system and increases the signal-to-noise ratio in the recorded signals, due to the higher availability of surface area. The main bottleneck of the out-of-plane electrode fabrication lies in the metallization process for transforming them into active electrodes, since the coverage of the side walls of almost vertical pillars is not trivial by standard processes in a clean room facility. This paper will discuss the different steps taken towards this goal and present the results that we have obtained so far.

Original language	English
Title of host publication	3rd International Workshop on Advances in sensors and Interfaces, 2009. IWASI 2009.
Publisher	IEEE
Publication date	2009
ISBN (Print)	978-1-4244-4708-4
DOIs	https://doi.org/10.1109/IWASI.2009.5184794
Publication status	Published - 2009
Event	3rd International Workshop on Advances in sensors and Interfaces, 2009. - Trani, Italy Duration: 1 Jan 2009 → …

Conference

Conference	3rd International Workshop on Advances in sensors and Interfaces, 2009.
City	Trani, Italy
Period	01/01/2009 → …

Bibliographical note

Copyright 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

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10.1109/IWASI.2009.5184794

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Cite this

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title = "Metallization of high aspect ratio, out of plane structures",

abstract = "This work is dedicated to developing a novel three dimensional structure for electrochemical measurements in neuronal studies. The final prototype will allow not only for the study and culture on chip of neuronal cells, but also of brain tissue. The use of out-of-plane electrodes instead of planar ones increases the sensitivity of the system and increases the signal-to-noise ratio in the recorded signals, due to the higher availability of surface area. The main bottleneck of the out-of-plane electrode fabrication lies in the metallization process for transforming them into active electrodes, since the coverage of the side walls of almost vertical pillars is not trivial by standard processes in a clean room facility. This paper will discuss the different steps taken towards this goal and present the results that we have obtained so far.",

author = "Patricia Vazquez and Maria Dimaki and Svendsen, {Winnie Edith}",

note = "Copyright 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.; 3rd International Workshop on Advances in sensors and Interfaces, 2009., IWASI 2009. ; Conference date: 01-01-2009",

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