| Original language | English |
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| Number of pages | 112 |
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| Publication status | Published - 2001 |
Cite this
Ravnkilde, J. T. (2001). Metallic Microdevices for Monolithic Integrated Microsystems.
Metallic Microdevices for Monolithic Integrated Microsystems
Jan Tue Ravnkilde
Research output: Book/Report › Ph.D. thesis › Research