MEMS-Teknologi i Nanoimprint Litografi

Rasmus Haugstrup Pedersen

    Research output: Book/Report › Ph.D. thesis › Research

    Original languageEnglish
    Place of PublicationKgs. Lyngby, Denmark
    PublisherTechnical University of Denmark
    Publication statusPublished - Mar 2010

    Cite this

    Pedersen, R. H. (2010). MEMS-Teknologi i Nanoimprint Litografi. Kgs. Lyngby, Denmark: Technical University of Denmark.