MEMS optical sensor

Kasper Reck (Inventor), Christian Østergaard (Inventor), Ole Hansen (Inventor), Erik Vilain Thomsen (Inventor)

Research output: Patent

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The present invention relates to an all-optical sensor utilizing effective index modulation of a waveguide and detection of a wavelength shift of reflected light and a force sensing system accommodating said optical sensor. One embodiment of the invention relates to a sensor system comprising at least one multimode light source, one or more optical sensors comprising a multimode sensor optical waveguide accommodating a distributed Bragg reflector, at least one transmitting optical waveguide for guiding light from said at least one light source to said one or more multimode sensor optical waveguides, a detector for measuring light reflected from said Bragg reflector in said one or more multimode sensor optical waveguides, and a data processor adapted for analyzing variations in the Bragg wavelength of at least one higher order mode of the reflected light.
Original languageEnglish
IPCG01L1/24; G01L11/02
Patent numberWO2013182643A1
Filing date12/12/2013
Country/TerritoryInternational Bureau of the World Intellectual Property Organization (WIPO)
Publication statusPublished - 2013

Bibliographical note

Also registered as: WO2013EP61701 20130606, EP20120171002 20120606, US201261656051P 20120606


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