MEMS fabricated energy harvesting device with 2D resonant structure

Andrea Crovetto, Fei Wang, Marco Triches, Ole Hansen

Research output: Contribution to conferencePaperResearchpeer-review


This paper reports on a MEMS energy harvester able to generate power from two perpendicular ambient vibration directions. CYTOP polymer is used both as the electret material for electrostatic transduction and as a bonding interface for low-temperature wafer bonding. With final chip size of ~1 cm2, an output power of 32.5 nW is reached with an external load of 17 MΩ, under a harmonic source motion with acceleration RMS amplitude 0.03 g (0.3 m/s2) and frequency 179 Hz.
Original languageEnglish
Publication date2012
Number of pages4
Publication statusPublished - 2012
EventPowerMEMS 2012 - Atlanta, United States
Duration: 2 Dec 20125 Dec 2012


ConferencePowerMEMS 2012
CountryUnited States


  • MEMS
  • Energy harvesting
  • Polymer electret
  • Wireless sensor networks
  • 2D vibrations

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