TY - JOUR
T1 - MEMS climate sensor for crops in greenhouses
AU - Birkelund, Karen
AU - Jensen, Kim Degn
AU - Højlund-Nielsen, Emil
AU - Nagstrup, Johan
AU - Lei, Anders
AU - Petersen, Søren D.
AU - Andreassen, Andrea U.
AU - Thomsen, Erik Vilain
PY - 2010
Y1 - 2010
N2 - We have developed and fabricated a multi-sensor chip for greenhouse applications and demonstrated the functionality under controlled conditions. The sensor consists of a humidity sensor, temperature sensor and three photodiodes sensitive to blue, red and white light, respectively. The humidity sensor responds linearly with humidity with a full scale change of 5.6 pF. The best performing design measures a relative change of 48%. The temperature sensor responds linearly with temperature with a temperature coefficient of resistance of 3.95 x 10(-3) K-1 and a sensitivity of 26.5 Omega degrees C-1. The three photodiodes have been characterized and show an almost ideal diode behavior with an ideality factor of 1.27 and a series resistance of 14.9 Omega. The diodes are sensitive to blue, red and white light with the measured quantum efficiencies of 69%, 81% and 68%, respectively. The temperature and humidity sensors have further been tested on plants in a greenhouse, demonstrating that individual plant behavior can be monitored.
AB - We have developed and fabricated a multi-sensor chip for greenhouse applications and demonstrated the functionality under controlled conditions. The sensor consists of a humidity sensor, temperature sensor and three photodiodes sensitive to blue, red and white light, respectively. The humidity sensor responds linearly with humidity with a full scale change of 5.6 pF. The best performing design measures a relative change of 48%. The temperature sensor responds linearly with temperature with a temperature coefficient of resistance of 3.95 x 10(-3) K-1 and a sensitivity of 26.5 Omega degrees C-1. The three photodiodes have been characterized and show an almost ideal diode behavior with an ideality factor of 1.27 and a series resistance of 14.9 Omega. The diodes are sensitive to blue, red and white light with the measured quantum efficiencies of 69%, 81% and 68%, respectively. The temperature and humidity sensors have further been tested on plants in a greenhouse, demonstrating that individual plant behavior can be monitored.
U2 - 10.1088/0960-1317/20/8/085021
DO - 10.1088/0960-1317/20/8/085021
M3 - Journal article
SN - 0960-1317
VL - 20
SP - 085021
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
IS - 8
ER -