MEMS climate sensor for crops in greenhouses

Karen Birkelund, Kim Degn Jensen, Emil Højlund-Nielsen, Johan Nagstrup, Anders Lei, Søren D. Petersen, Andrea U. Andreassen, Erik Vilain Thomsen

    Research output: Contribution to journalJournal articleResearchpeer-review


    We have developed and fabricated a multi-sensor chip for greenhouse applications and demonstrated the functionality under controlled conditions. The sensor consists of a humidity sensor, temperature sensor and three photodiodes sensitive to blue, red and white light, respectively. The humidity sensor responds linearly with humidity with a full scale change of 5.6 pF. The best performing design measures a relative change of 48%. The temperature sensor responds linearly with temperature with a temperature coefficient of resistance of 3.95 x 10(-3) K-1 and a sensitivity of 26.5 Omega degrees C-1. The three photodiodes have been characterized and show an almost ideal diode behavior with an ideality factor of 1.27 and a series resistance of 14.9 Omega. The diodes are sensitive to blue, red and white light with the measured quantum efficiencies of 69%, 81% and 68%, respectively. The temperature and humidity sensors have further been tested on plants in a greenhouse, demonstrating that individual plant behavior can be monitored.
    Original languageEnglish
    JournalJournal of Micromechanics and Microengineering
    Issue number8
    Pages (from-to)085021
    Publication statusPublished - 2010


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