MEMS Bragg grating force sensor

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Abstract

We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors. © 2011 Optical Society of America.
Original languageEnglish
JournalOptics Express
Volume19
Issue number20
Pages (from-to)19190-19198
DOIs
Publication statusPublished - 2011

Keywords

  • All-optical devices
  • Integrated optics devices
  • Optomechanics

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