MEMS Bragg grating force sensor

Kasper Reck; Erik Vilain Thomsen; Ole Hansen

doi:10.1364/OE.19.019190

MEMS Bragg grating force sensor

Kasper Reck, Erik Vilain Thomsen, Ole Hansen

Center for Individual Nanoparticle Functionality

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Abstract

We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors. © 2011 Optical Society of America.

Original language	English
Journal	Optics Express
Volume	19
Issue number	20
Pages (from-to)	19190-19198
DOIs	https://doi.org/10.1364/OE.19.019190
Publication status	Published - 2011

Keywords

All-optical devices
Integrated optics devices
Optomechanics

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10.1364/OE.19.019190

B4A10A5D-0E8E-1797-62068A222ED8669F 222586[1]Final published version, 1.36 MB

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AB - We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors. © 2011 Optical Society of America.

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KW - Integrated optics devices

KW - Optomechanics

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MEMS Bragg grating force sensor

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