MEMS-based thick film PZT vibrational energy harvester

Anders Lei, Ruichao Xu, Anders Thyssen, Adam Carsten Stoot, Thomas Lehrmann Christiansen, K Hansen, R Lou-Moller, Erik Vilain Thomsen, Karen Birkelund

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review


    We present a MEMS-based unimorph silicon/PZT thick film vibrational energy harvester with an integrated proof mass. We have developed a process that allows fabrication of high performance silicon based energy harvesters with a yield higher than 90%. The process comprises a KOH etch using a mechanical front side protection of an SOI wafer with screen printed PZT thick film. The fabricated harvester device produces 14.0 μW with an optimal resistive load of 100 kΩ from 1g (g=9.81 m s-2) input acceleration at its resonant frequency of 235 Hz.
    Original languageEnglish
    Title of host publicationMicro Electro Mechanical Systems (MEMS)
    Publication date2011
    ISBN (Print)978-1-4244-9632-7
    Publication statusPublished - 2011
    Event24th International Conference on Micro Electro Mechanical Systems - Hilton Cancun Golf & Spa Resort, Cancun, Mexico
    Duration: 23 Jan 201127 Jan 2011
    Conference number: 24


    Conference24th International Conference on Micro Electro Mechanical Systems
    LocationHilton Cancun Golf & Spa Resort
    Internet address


    • Micromechanical devices
    • Silicon
    • Silicon-on-insulator
    • Lead compounds
    • Energy harvesting
    • Thick film devices
    • Etching
    • Microfabrication


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