MEMS Accelerometer with Screen Printed Piezoelectric Thick Film

Christian Carstensen Hindrichsen; R. Lau-Moeller; T. Bove; Erik Vilain Thomsen

doi:10.1109/ICSENS.2007.355913

MEMS Accelerometer with Screen Printed Piezoelectric Thick Film

Christian Carstensen Hindrichsen, R. Lau-Moeller, T. Bove, Erik Vilain Thomsen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

A bulk-micromachined piezoelectric MEMS accelerometer with screen printed piezoelectric Pb(ZrxTil )O3(PZT) thick film (TF) as the sensing material has been fabricated and characterized. The accelerometer has a four beam structure with a central seismic mass (3600x3600x500 pm3) and a total chip size of 10x1O mm2. The resonance frequency is found to be 17.5 kHz and the sensitivity 4.15 mV/g for a single beam.

Original language	English
Title of host publication	Proceedings of the IEEE Sensors, IEEE, 2006
Publisher	IEEE
Publication date	2007
ISBN (Print)	1-4244-0376-6
DOIs	https://doi.org/10.1109/ICSENS.2007.355913
Publication status	Published - 2007
Event	5th IEEE Conference on Sensors - Daegu, Korea, Republic of Duration: 22 Oct 2006 → 25 Oct 2006 Conference number: 5 http://ewh.ieee.org/conf/sensors2006/

Conference

Conference	5th IEEE Conference on Sensors
Number	5
Country/Territory	Korea, Republic of
City	Daegu
Period	22/10/2006 → 25/10/2006
Internet address	http://ewh.ieee.org/conf/sensors2006/

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Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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title = "MEMS Accelerometer with Screen Printed Piezoelectric Thick Film",

abstract = "A bulk-micromachined piezoelectric MEMS accelerometer with screen printed piezoelectric Pb(ZrxTil )O3(PZT) thick film (TF) as the sensing material has been fabricated and characterized. The accelerometer has a four beam structure with a central seismic mass (3600x3600x500 pm3) and a total chip size of 10x1O mm2. The resonance frequency is found to be 17.5 kHz and the sensitivity 4.15 mV/g for a single beam.",

author = "Hindrichsen, {Christian Carstensen} and R. Lau-Moeller and T. Bove and Thomsen, {Erik Vilain}",

note = "Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE; 5th IEEE Conference on Sensors, IEEE Sensors 2006 ; Conference date: 22-10-2006 Through 25-10-2006",

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AU - Thomsen, Erik Vilain

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N2 - A bulk-micromachined piezoelectric MEMS accelerometer with screen printed piezoelectric Pb(ZrxTil )O3(PZT) thick film (TF) as the sensing material has been fabricated and characterized. The accelerometer has a four beam structure with a central seismic mass (3600x3600x500 pm3) and a total chip size of 10x1O mm2. The resonance frequency is found to be 17.5 kHz and the sensitivity 4.15 mV/g for a single beam.

AB - A bulk-micromachined piezoelectric MEMS accelerometer with screen printed piezoelectric Pb(ZrxTil )O3(PZT) thick film (TF) as the sensing material has been fabricated and characterized. The accelerometer has a four beam structure with a central seismic mass (3600x3600x500 pm3) and a total chip size of 10x1O mm2. The resonance frequency is found to be 17.5 kHz and the sensitivity 4.15 mV/g for a single beam.

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DO - 10.1109/ICSENS.2007.355913

M3 - Article in proceedings

SN - 1-4244-0376-6

BT - Proceedings of the IEEE Sensors, IEEE, 2006

PB - IEEE

T2 - 5th IEEE Conference on Sensors

Y2 - 22 October 2006 through 25 October 2006

ER -

MEMS Accelerometer with Screen Printed Piezoelectric Thick Film

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