MEMS Accelerometer with Screen Printed Piezoelectric Thick Film

Christian Carstensen Hindrichsen, R. Lau-Moeller, T. Bove, Erik Vilain Thomsen

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    A bulk-micromachined piezoelectric MEMS accelerometer with screen printed piezoelectric Pb(ZrxTil )O3(PZT) thick film (TF) as the sensing material has been fabricated and characterized. The accelerometer has a four beam structure with a central seismic mass (3600x3600x500 pm3) and a total chip size of 10x1O mm2. The resonance frequency is found to be 17.5 kHz and the sensitivity 4.15 mV/g for a single beam.
    Original languageEnglish
    Title of host publicationProceedings of the IEEE Sensors, IEEE, 2006
    Publication date2007
    ISBN (Print)1-4244-0376-6
    Publication statusPublished - 2007
    Event5th IEEE Conference on Sensors - Daegu, Korea, Republic of
    Duration: 22 Oct 200625 Oct 2006
    Conference number: 5


    Conference5th IEEE Conference on Sensors
    CountryKorea, Republic of
    Internet address

    Bibliographical note

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