MEMS Accelerometer with Screen Printed Piezoelectric Thick Film

Christian Carstensen Hindrichsen, R. Lau-Moeller, T. Bove, Erik Vilain Thomsen

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    Abstract

    A bulk-micromachined piezoelectric MEMS accelerometer with screen printed piezoelectric Pb(ZrxTil )O3(PZT) thick film (TF) as the sensing material has been fabricated and characterized. The accelerometer has a four beam structure with a central seismic mass (3600x3600x500 pm3) and a total chip size of 10x1O mm2. The resonance frequency is found to be 17.5 kHz and the sensitivity 4.15 mV/g for a single beam.
    Original languageEnglish
    Title of host publicationProceedings of the IEEE Sensors, IEEE, 2006
    PublisherIEEE
    Publication date2007
    ISBN (Print)1-4244-0376-6
    DOIs
    Publication statusPublished - 2007
    Event5th IEEE Conference on Sensors - Daegu, Korea, Republic of
    Duration: 22 Oct 200625 Oct 2006
    Conference number: 5
    http://ewh.ieee.org/conf/sensors2006/

    Conference

    Conference5th IEEE Conference on Sensors
    Number5
    CountryKorea, Republic of
    CityDaegu
    Period22/10/200625/10/2006
    Internet address

    Bibliographical note

    Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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