Mechanical Characterization and design of flexible silicon microstructures

Torben Lisby, Stefan A. Nikles, Khalil Najafi, Ole Hansen, Siebe Bouwstra, Jens Branebjerg

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalI E E E Journal of Microelectromechanical Systems
    Volume13
    Issue number3
    Pages (from-to)452-464
    ISSN1057-7157
    Publication statusPublished - 2004

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