| Original language | English |
|---|---|
| Title of host publication | Proceedings of Euorosensors XIV |
| Place of Publication | Copenhagen, Denmark |
| Publication date | 2000 |
| Pages | 157-158 |
| Publication status | Published - 2000 |
Mechanical characterisation of flexible silicon microstructures
Torben Lisby, S. Nikles, K. Najafi, Ole Hansen, Siebe Bouwstra, J Branebjerg
Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review