Measurements of beam skirt profiles under various conditions in low vacuum SEMs

Jørgen Bilde-Sørensen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research

Original language	English
Title of host publication	Proceedings book
Editors	S. Jørgensen, A.E. Gunnæs
Place of Publication	s.l.
Publisher	Scandinavian Society for Electron Microscopy
Publication date	2003
Pages	47-48
Publication status	Published - 2003
Event	SCANDEM 2003. 54. Annual meeting of the Scandinavian Society for Electron Microscopy - Oslo (NO), 10-13 Jun Duration: 1 Jan 2003 → …

Conference	SCANDEM 2003. 54. Annual meeting of the Scandinavian Society for Electron Microscopy
City	Oslo (NO), 10-13 Jun
Period	01/01/2003 → …

OpenUrl availability

@inproceedings{4e1c37e730e64c9781737443f9a58fc0,

title = "Measurements of beam skirt profiles under various conditions in low vacuum SEMs",

keywords = "5-I nano",

author = "J{\o}rgen Bilde-S{\o}rensen",

year = "2003",

language = "English",

pages = "47--48",

editor = "S. J{\o}rgensen and A.E. Gunn{\ae}s",

booktitle = "Proceedings book",

publisher = "Scandinavian Society for Electron Microscopy",

note = "SCANDEM 2003. 54. Annual meeting of the Scandinavian Society for Electron Microscopy ; Conference date: 01-01-2003",

}

TY - GEN

T1 - Measurements of beam skirt profiles under various conditions in low vacuum SEMs

AU - Bilde-Sørensen, Jørgen

PY - 2003

Y1 - 2003

KW - 5-I nano

M3 - Article in proceedings

SP - 47

EP - 48

BT - Proceedings book

A2 - Jørgensen, S.

A2 - Gunnæs, A.E.

PB - Scandinavian Society for Electron Microscopy

CY - s.l.

T2 - SCANDEM 2003. 54. Annual meeting of the Scandinavian Society for Electron Microscopy

Y2 - 1 January 2003

ER -