Measurement of the beam skirt profile in a low vacuum SEM

Jørgen Bilde-Sørensen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearch

    Original languageEnglish
    Title of host publicationProceedings. Vol. 1. Instrumentation and methodology
    EditorsD. Van Dyck, P. Van Oostveldt
    Place of PublicationLiège
    PublisherBelgian Society for Microscopy
    Publication date2004
    Pages331-332
    Publication statusPublished - 2004
    Event13th European Microscopy Congress - Antwerp, Belgium
    Duration: 22 Aug 200427 Aug 2004

    Conference

    Conference13th European Microscopy Congress
    CountryBelgium
    CityAntwerp
    Period22/08/200427/08/2004

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