Measurement of multilayer reflectivities from 8 keV to 130 keV

P. Hoeghoej, K. D. Joensen, Finn Erland Christensen, J. Susini

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This paper presents measurements of specular and non-specular reflectivities of a W/Si multilayer with period d=135.1 A. Angular dispersive measurements were performed at 8.05 keY and 59.3 keY, while energy dispersive measurements were made in the range of 17 keV to 130 keY. At an incidence angle of 1.57 mrad the fourth order Bragg-reflection is found at an energy of 120 keY with a reflectivity in excess of 50 % and a bandwidth (FWHM) of 3 %.
Original languageEnglish
JournalProceedings of SPIE, the International Society for Optical Engineering
Issue number2011
Pages (from-to)354-359
Publication statusPublished - 1993
EventMultilayer and Grazing Incidence X-Ray/EUV Optics II - San Diego, CA, United States
Duration: 14 Jul 199316 Jul 1993


ConferenceMultilayer and Grazing Incidence X-Ray/EUV Optics II
CountryUnited States
CitySan Diego, CA

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