Measurement of EEDF by using high-efficiency laser Thomson scattering spectroscopy in the vicinity of the dielectric window of a surface wave plasma source

M. Aramaki, J. Kobayashi, A. Kono, Eugen Stamate, H. Sugai

Research output: Contribution to journalConference abstract in journalResearchpeer-review

Original languageEnglish
Article number67
JournalAmerican Physical Society. Bulletin
Volume49
Issue number5
Number of pages1
ISSN0003-0503
Publication statusPublished - 2004
Externally publishedYes
Event57th Gaseous Electronics Conference - Fitzpatrick Bunratty Hotel, Bunratty, Ireland
Duration: 26 Sep 200429 Sep 2004

Conference

Conference57th Gaseous Electronics Conference
LocationFitzpatrick Bunratty Hotel
CountryIreland
CityBunratty
Period26/09/200429/09/2004

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