Measurement noise of a point autofocus surface topography instrument

Xiaobing Feng, Danilo Quagliotti, Giacomo Maculotti, Wahyudin P. Syam, Guido Tosello, Hans N. Hansen, Maurizio Galetto, Richard Leach

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Abstract

Optical instruments for areal topography measurement can be especially sensitive to noise when scanning is required. Such noise has different sources, including those internally generated and external sources from the environment.
Original languageEnglish
Publication date2017
Number of pages2
Publication statusPublished - 2017
Event16th International Conference on Metrology and Properties of Engineering Surfaces (Met&Props 2017) - Gothenburg, Sweden
Duration: 27 Jun 201729 Jun 2017

Conference

Conference16th International Conference on Metrology and Properties of Engineering Surfaces (Met&Props 2017)
CountrySweden
CityGothenburg
Period27/06/201729/06/2017

Keywords

  • Areal
  • Measurement
  • Noise
  • Surface
  • Texture
  • Point autofocus
  • Optical microscope

Cite this

Feng, X., Quagliotti, D., Maculotti, G., P. Syam, W., Tosello, G., Hansen, H. N., ... Leach, R. (2017). Measurement noise of a point autofocus surface topography instrument. Abstract from 16th International Conference on Metrology and Properties of Engineering Surfaces (Met&Props 2017), Gothenburg, Sweden.