Measurement noise of a point autofocus surface topography instrument

Xiaobing Feng, Danilo Quagliotti, Giacomo Maculotti, Wahyudin P. Syam, Guido Tosello, Hans N. Hansen, Maurizio Galetto, Richard Leach

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    Abstract

    Optical instruments for areal topography measurement can be especially sensitive to noise when scanning is required. Such noise has different sources, including those internally generated and external sources from the environment.
    Original languageEnglish
    Publication date2017
    Number of pages2
    Publication statusPublished - 2017
    Event16th International Conference on Metrology and Properties of Engineering Surfaces (Met&Props 2017) - Gothenburg, Sweden
    Duration: 27 Jun 201729 Jun 2017

    Conference

    Conference16th International Conference on Metrology and Properties of Engineering Surfaces (Met&Props 2017)
    Country/TerritorySweden
    CityGothenburg
    Period27/06/201729/06/2017

    Keywords

    • Areal
    • Measurement
    • Noise
    • Surface
    • Texture
    • Point autofocus
    • Optical microscope

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