Material and optical properties of silicon rich nitride

Karin Nordström Andersen; Winnie Edith Svendsen; T. Stimpel-Lindner; T. Sulima; H. Philipp; H. Baumgärtner

Material and optical properties of silicon rich nitride

Karin Nordström Andersen
, Winnie Edith Svendsen
, T. Stimpel-Lindner
, T. Sulima
, H. Philipp
, H. Baumgärtner

Research output: Contribution to conference › Poster › Research

Original language	English
Publication date	2005
Publication status	Published - 2005
Event	KIF and DFS Annual Meeting - Nyborg, Denmark Duration: 1 Jun 2005 → 3 Jun 2005 http://www.dfs.nbi.dk/aarsmoeder/2005/aarsmoede2005.html

Conference

Conference	KIF and DFS Annual Meeting
Country/Territory	Denmark
City	Nyborg
Period	01/06/2005 → 03/06/2005
Internet address	http://www.dfs.nbi.dk/aarsmoeder/2005/aarsmoede2005.html

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Cite this

@conference{4b169ee7bd0b4730b0841390f7adc617,

title = "Material and optical properties of silicon rich nitride",

author = "Andersen, \{Karin Nordstr{\"o}m\} and Svendsen, \{Winnie Edith\} and T. Stimpel-Lindner and T. Sulima and H. Philipp and H. Baumg{\"a}rtner",

year = "2005",

language = "English",

note = "KIF and DFS Annual Meeting ; Conference date: 01-06-2005 Through 03-06-2005",

url = "http://www.dfs.nbi.dk/aarsmoeder/2005/aarsmoede2005.html",

}