Mass density and hydrogen content of a-C:H DLC films related to the preparation by PE-CVD

M.E. Vigild, E. Findeisen, R. Feidenhans'l, C. Barholm-Hansen, M. Bentzon, J. Bindslev Hansen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalAmerican Physical Society. Bulletin
    Volume40
    Issue number1
    Pages (from-to)257
    ISSN0003-0503
    Publication statusPublished - 1995

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