Mass density and hydrogen content diamondlike carbon as related to the preparation by plasma-enhanced chemical vapor deposition

M.E. Vigild, E. Findeisen, R. Feidenhans'l, C. Barholm-Hansen, M.D. Bentzon, J.B. Hansen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalJournal of Applied Physics
    Volume79
    Pages (from-to)4050-4056
    ISSN0021-8979
    Publication statusPublished - 1996

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