Low energy Ar+ cleaning, damage, and sputtering of InP(100) surface

M.M. Sung, Seunghwan Lee, S.M. Lee, D. Marton, S.S. Perry, J.W. Rabalais

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of 11th Int. Conference on Ion Implant Technology 1997
Publication date1997
Pages595-598
Publication statusPublished - 1997
Externally publishedYes
Event11th International Conference on Ion Implant Technology - Austin, United States
Duration: 16 Jun 199621 Jun 1996
Conference number: 11

Conference

Conference11th International Conference on Ion Implant Technology
Number11
Country/TerritoryUnited States
CityAustin
Period16/06/199621/06/1996

Cite this