Low energy Ar+ cleaning, damage, and sputtering of InP(100) surface

M.M. Sung, Seunghwan Lee, S.M. Lee, D. Marton, S.S. Perry, J.W. Rabalais

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of 11th Int. Conference on Ion Implant Technology 1997
Publication date1997
Pages595-598
Publication statusPublished - 1997
Externally publishedYes
Event11th International Conference on Ion Implant Technology - Austin, TX, United States
Duration: 16 Jun 199621 Jun 1996

Conference

Conference11th International Conference on Ion Implant Technology
CountryUnited States
CityAustin, TX
Period16/06/199621/06/1996

Cite this

Sung, M. M., Lee, S., Lee, S. M., Marton, D., Perry, S. S., & Rabalais, J. W. (1997). Low energy Ar+ cleaning, damage, and sputtering of InP(100) surface. In Proceedings of 11th Int. Conference on Ion Implant Technology 1997 (pp. 595-598)