Low-dimensional structures generated by misfit dislocations in the bulk of Si1 - xGex/Si heteroepitaxial systems

Sergey Y. Shiryaev; Flemming Jensen; Jon Wulff Petersen; Lundsgaard J. Hansen; Nylandsted Arne Larsen

doi:10.1063/1.119758

Low-dimensional structures generated by misfit dislocations in the bulk of Si1 - xGex/Si heteroepitaxial systems

Sergey Y. Shiryaev, Flemming Jensen, Jon Wulff Petersen, Lundsgaard J. Hansen, Nylandsted Arne Larsen

Research output: Contribution to journal › Journal article › Research › peer-review

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Abstract

The capability of misfit dislocations to generate nanostructures in the bulk of Si1-xGex/Si heteroepitaxial systems is demonstrated. It is shown that dislocation slip originating from compositionally graded Si1-xGex layers can produce a range of low-dimensional structures including nanowires, nanodots, and mosaic superlattices. Formation of the nanostructures is achieved in parallel processing, through a simple two-step cycle which includes growth of layered planar structures and postgrowth annealing. (C) 1997 American Institute of Physics.

Original language	English
Journal	Applied Physics Letters
Volume	71
Issue number	14
Pages (from-to)	1972-1974
ISSN	0003-6951
DOIs	https://doi.org/10.1063/1.119758
Publication status	Published - 1997

Bibliographical note

Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Keywords

RELAXATION

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abstract = "The capability of misfit dislocations to generate nanostructures in the bulk of Si1-xGex/Si heteroepitaxial systems is demonstrated. It is shown that dislocation slip originating from compositionally graded Si1-xGex layers can produce a range of low-dimensional structures including nanowires, nanodots, and mosaic superlattices. Formation of the nanostructures is achieved in parallel processing, through a simple two-step cycle which includes growth of layered planar structures and postgrowth annealing. (C) 1997 American Institute of Physics.",

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Low-dimensional structures generated by misfit dislocations in the bulk of Si1 - xGex/Si heteroepitaxial systems. / Shiryaev, Sergey Y.; Jensen, Flemming; Petersen, Jon Wulff; Hansen, Lundsgaard J.; Larsen, Nylandsted Arne.

In: Applied Physics Letters, Vol. 71, No. 14, 1997, p. 1972-1974.

Research output: Contribution to journal › Journal article › Research › peer-review

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AU - Larsen, Nylandsted Arne

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