Longitudinal bulk acoustic mass sensor

Jan Harry Hales, Jordi Teva, Anja Boisen, Zachary James Davis

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    Abstract

    A polycrystalline silicon longitudinal bulk acoustic cantilever is fabricated and operated in air at 51 MHz. A mass sensitivity of 100 Hz/fg (1 fg=10(-15) g) is obtained from the preliminary experiments where a minute mass is deposited on the device by means of focused ion beam. The total noise in the currently applied measurement system allows for a minimum detectable mass of 0.5 fg in air.
    Original languageEnglish
    JournalApplied Physics Letters
    Volume95
    Issue number3
    Pages (from-to)033506
    ISSN0003-6951
    DOIs
    Publication statusPublished - 2009

    Bibliographical note

    Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

    Keywords

    • cantilevers
    • elemental semiconductors
    • bulk acoustic wave devices
    • silicon
    • focused ion beam technology
    • mass measurement

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