A polycrystalline silicon longitudinal bulk acoustic cantilever is fabricated and operated in air at 51 MHz. A mass sensitivity of 100 Hz/fg (1 fg=10(-15) g) is obtained from the preliminary experiments where a minute mass is deposited on the device by means of focused ion beam. The total noise in the currently applied measurement system allows for a minimum detectable mass of 0.5 fg in air.
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- elemental semiconductors
- bulk acoustic wave devices
- focused ion beam technology
- mass measurement