Longitudinal bulk acoustic mass sensor

Jan Harry Hales, Jordi Teva, Anja Boisen, Zachary James Davis

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    Abstract

    A polycrystalline silicon longitudinal bulk acoustic cantilever is fabricated and operated in air at 51 MHz. A mass sensitivity of 100 Hz/fg (1 fg=10(-15) g) is obtained from the preliminary experiments where a minute mass is deposited on the device by means of focused ion beam. The total noise in the currently applied measurement system allows for a minimum detectable mass of 0.5 fg in air.
    Original languageEnglish
    JournalApplied Physics Letters
    Volume95
    Issue number3
    Pages (from-to)033506
    ISSN0003-6951
    DOIs
    Publication statusPublished - 2009

    Bibliographical note

    Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

    Keywords

    • cantilevers
    • elemental semiconductors
    • bulk acoustic wave devices
    • silicon
    • focused ion beam technology
    • mass measurement

    Cite this

    Hales, Jan Harry ; Teva, Jordi ; Boisen, Anja ; Davis, Zachary James. / Longitudinal bulk acoustic mass sensor. In: Applied Physics Letters. 2009 ; Vol. 95, No. 3. pp. 033506.
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    abstract = "A polycrystalline silicon longitudinal bulk acoustic cantilever is fabricated and operated in air at 51 MHz. A mass sensitivity of 100 Hz/fg (1 fg=10(-15) g) is obtained from the preliminary experiments where a minute mass is deposited on the device by means of focused ion beam. The total noise in the currently applied measurement system allows for a minimum detectable mass of 0.5 fg in air.",
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    author = "Hales, {Jan Harry} and Jordi Teva and Anja Boisen and Davis, {Zachary James}",
    note = "Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.",
    year = "2009",
    doi = "10.1063/1.3168519",
    language = "English",
    volume = "95",
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    Hales, JH, Teva, J, Boisen, A & Davis, ZJ 2009, 'Longitudinal bulk acoustic mass sensor', Applied Physics Letters, vol. 95, no. 3, pp. 033506. https://doi.org/10.1063/1.3168519

    Longitudinal bulk acoustic mass sensor. / Hales, Jan Harry; Teva, Jordi; Boisen, Anja; Davis, Zachary James.

    In: Applied Physics Letters, Vol. 95, No. 3, 2009, p. 033506.

    Research output: Contribution to journalJournal articleResearchpeer-review

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    T1 - Longitudinal bulk acoustic mass sensor

    AU - Hales, Jan Harry

    AU - Teva, Jordi

    AU - Boisen, Anja

    AU - Davis, Zachary James

    N1 - Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

    PY - 2009

    Y1 - 2009

    N2 - A polycrystalline silicon longitudinal bulk acoustic cantilever is fabricated and operated in air at 51 MHz. A mass sensitivity of 100 Hz/fg (1 fg=10(-15) g) is obtained from the preliminary experiments where a minute mass is deposited on the device by means of focused ion beam. The total noise in the currently applied measurement system allows for a minimum detectable mass of 0.5 fg in air.

    AB - A polycrystalline silicon longitudinal bulk acoustic cantilever is fabricated and operated in air at 51 MHz. A mass sensitivity of 100 Hz/fg (1 fg=10(-15) g) is obtained from the preliminary experiments where a minute mass is deposited on the device by means of focused ion beam. The total noise in the currently applied measurement system allows for a minimum detectable mass of 0.5 fg in air.

    KW - cantilevers

    KW - elemental semiconductors

    KW - bulk acoustic wave devices

    KW - silicon

    KW - focused ion beam technology

    KW - mass measurement

    U2 - 10.1063/1.3168519

    DO - 10.1063/1.3168519

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    SP - 033506

    JO - Applied Physics Letters

    JF - Applied Physics Letters

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