Longitudinal bulk acoustic mass sensor

Jan Harry Hales; Jordi Teva; Anja Boisen; Zachary James Davis

doi:10.1063/1.3168519

Longitudinal bulk acoustic mass sensor

Jan Harry Hales, Jordi Teva, Anja Boisen, Zachary James Davis

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Abstract

A polycrystalline silicon longitudinal bulk acoustic cantilever is fabricated and operated in air at 51 MHz. A mass sensitivity of 100 Hz/fg (1 fg=10(-15) g) is obtained from the preliminary experiments where a minute mass is deposited on the device by means of focused ion beam. The total noise in the currently applied measurement system allows for a minimum detectable mass of 0.5 fg in air.

Original language	English
Journal	Applied Physics Letters
Volume	95
Issue number	3
Pages (from-to)	033506
ISSN	0003-6951
DOIs	https://doi.org/10.1063/1.3168519
Publication status	Published - 2009

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Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Keywords

cantilevers
elemental semiconductors
bulk acoustic wave devices
silicon
focused ion beam technology
mass measurement

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10.1063/1.3168519

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http://link.aip.org/link/APPLAB/v95/i3/p033506/s1

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abstract = "A polycrystalline silicon longitudinal bulk acoustic cantilever is fabricated and operated in air at 51 MHz. A mass sensitivity of 100 Hz/fg (1 fg=10(-15) g) is obtained from the preliminary experiments where a minute mass is deposited on the device by means of focused ion beam. The total noise in the currently applied measurement system allows for a minimum detectable mass of 0.5 fg in air.",

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AB - A polycrystalline silicon longitudinal bulk acoustic cantilever is fabricated and operated in air at 51 MHz. A mass sensitivity of 100 Hz/fg (1 fg=10(-15) g) is obtained from the preliminary experiments where a minute mass is deposited on the device by means of focused ion beam. The total noise in the currently applied measurement system allows for a minimum detectable mass of 0.5 fg in air.

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Longitudinal bulk acoustic mass sensor

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