Longitudinal bulk a coustic mass sensor

Jan Harry Hales; Jordi Teva; Anja Boisen; Zachary James Davis

doi:10.1109/SENSOR.2009.5285500

Longitudinal bulk a coustic mass sensor

Jan Harry Hales, Jordi Teva, Anja Boisen, Zachary James Davis

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Abstract

Design, fabrication and characterization, in terms of mass sensitivity, is presented for a polycrystalline silicon longitudinal bulk acoustic cantilever. The device is operated in air at 51 MHz, resulting in a mass sensitivity of 100 HZ/fg (1 fg = 10{su−15 g). The initial characterization is conducted by depositing a minute mass by means of focused ion beam. The total noise in the currently applied measurement system allows for a mass resolution of 0.4 fg in air.

Original language	English
Title of host publication	International Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009.
Publisher	IEEE
Publication date	2009
Pages	311-314
ISBN (Electronic)	978-1-4244-4193-8
DOIs	https://doi.org/10.1109/SENSOR.2009.5285500
Publication status	Published - 2009
Event	15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009) - Denver,CO, United States Duration: 21 Jun 2009 → 25 Jun 2009 Conference number: 15

Conference

Conference	15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009)
Number	15
Country/Territory	United States
City	Denver,CO
Period	21/06/2009 → 25/06/2009

Bibliographical note

Copyright: 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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title = "Longitudinal bulk a coustic mass sensor",

abstract = "Design, fabrication and characterization, in terms of mass sensitivity, is presented for a polycrystalline silicon longitudinal bulk acoustic cantilever. The device is operated in air at 51 MHz, resulting in a mass sensitivity of 100 HZ/fg (1 fg = 10{su−15 g). The initial characterization is conducted by depositing a minute mass by means of focused ion beam. The total noise in the currently applied measurement system allows for a mass resolution of 0.4 fg in air.",

author = "Hales, {Jan Harry} and Jordi Teva and Anja Boisen and Davis, {Zachary James}",

note = "Copyright: 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE; 15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009), Transducers 2009 ; Conference date: 21-06-2009 Through 25-06-2009",

year = "2009",

doi = "10.1109/SENSOR.2009.5285500",

language = "English",

pages = "311--314",

booktitle = "International Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009.",

publisher = "IEEE",

address = "United States",

}

Hales, JH, Teva, J, Boisen, A & Davis, ZJ 2009, Longitudinal bulk a coustic mass sensor. in International Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009.. IEEE, pp. 311-314, 15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009), Denver,CO, United States, 21/06/2009. https://doi.org/10.1109/SENSOR.2009.5285500

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AU - Teva, Jordi

AU - Boisen, Anja

AU - Davis, Zachary James

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PY - 2009

Y1 - 2009

N2 - Design, fabrication and characterization, in terms of mass sensitivity, is presented for a polycrystalline silicon longitudinal bulk acoustic cantilever. The device is operated in air at 51 MHz, resulting in a mass sensitivity of 100 HZ/fg (1 fg = 10{su−15 g). The initial characterization is conducted by depositing a minute mass by means of focused ion beam. The total noise in the currently applied measurement system allows for a mass resolution of 0.4 fg in air.

AB - Design, fabrication and characterization, in terms of mass sensitivity, is presented for a polycrystalline silicon longitudinal bulk acoustic cantilever. The device is operated in air at 51 MHz, resulting in a mass sensitivity of 100 HZ/fg (1 fg = 10{su−15 g). The initial characterization is conducted by depositing a minute mass by means of focused ion beam. The total noise in the currently applied measurement system allows for a mass resolution of 0.4 fg in air.

U2 - 10.1109/SENSOR.2009.5285500

DO - 10.1109/SENSOR.2009.5285500

M3 - Article in proceedings

SP - 311

EP - 314

BT - International Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009.

PB - IEEE

T2 - 15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009)

Y2 - 21 June 2009 through 25 June 2009

ER -

Longitudinal bulk a coustic mass sensor

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