Longitudinal bulk a coustic mass sensor

Jan Harry Hales, Jordi Teva, Anja Boisen, Zachary James Davis

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearch

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    Design, fabrication and characterization, in terms of mass sensitivity, is presented for a polycrystalline silicon longitudinal bulk acoustic cantilever. The device is operated in air at 51 MHz, resulting in a mass sensitivity of 100 HZ/fg (1 fg = 10{su−15 g). The initial characterization is conducted by depositing a minute mass by means of focused ion beam. The total noise in the currently applied measurement system allows for a mass resolution of 0.4 fg in air.
    Original languageEnglish
    Title of host publicationInternational Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009.
    Publication date2009
    ISBN (Electronic)978-1-4244-4193-8
    Publication statusPublished - 2009
    Event15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009) - Denver,CO, United States
    Duration: 21 Jun 200925 Jun 2009
    Conference number: 15


    Conference15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009)
    Country/TerritoryUnited States

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