Linear and nonlinear effects at low energy ion bombardment of solid xenon

L. Dutkiewicz; R. Pedrys; Jørgen Schou

doi:10.1016/0168-583X(96)00176-0

Linear and nonlinear effects at low energy ion bombardment of solid xenon

L. Dutkiewicz
, R. Pedrys
, Jørgen Schou

Research output: Contribution to journal › Conference article › Research › peer-review

Abstract

Elastic sputtering of crystalline xenon by 20-750 eV Xe ions has been studied with molecular dynamics. The nonlinear effects are dominant at 250 eV ion bombardment. They result in a partly amorphization of the impact volume as well as in a considerable reduction of the surface binding energy in this volume during the sputtering process.

Original language	English
Journal	Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
Volume	115
Issue number	1-4
Pages (from-to)	478-481
ISSN	0168-583X
DOIs	https://doi.org/10.1016/0168-583X(96)00176-0
Publication status	Published - 1996
Event	16th International Conference on Atomic Collisions in Solids (ICACS-16) - Linz, Austria Duration: 17 Jul 1995 → 21 Jul 1995 Conference number: 16

Conference

Conference	16th International Conference on Atomic Collisions in Solids (ICACS-16)
Number	16
Country/Territory	Austria
City	Linz
Period	17/07/1995 → 21/07/1995

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title = "Linear and nonlinear effects at low energy ion bombardment of solid xenon",

abstract = "Elastic sputtering of crystalline xenon by 20-750 eV Xe ions has been studied with molecular dynamics. The nonlinear effects are dominant at 250 eV ion bombardment. They result in a partly amorphization of the impact volume as well as in a considerable reduction of the surface binding energy in this volume during the sputtering process. ",

keywords = "Optisk m{\aa}leteknik og informationsbehandling; Optik og sensorsystemer",

author = "L. Dutkiewicz and R. Pedrys and J{\o}rgen Schou",

year = "1996",

doi = "10.1016/0168-583X(96)00176-0",

language = "English",

volume = "115",

pages = "478--481",

journal = "Nuclear Instruments \& Methods in Physics Research Section B-beam Interactions With Materials and Atoms",

issn = "0168-583X",

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note = "16th International Conference on Atomic Collisions in Solids (ICACS-16), ICACS-16 ; Conference date: 17-07-1995 Through 21-07-1995",

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TY - GEN

T1 - Linear and nonlinear effects at low energy ion bombardment of solid xenon

AU - Dutkiewicz, L.

AU - Pedrys, R.

AU - Schou, Jørgen

N1 - Conference code: 16

PY - 1996

Y1 - 1996

N2 - Elastic sputtering of crystalline xenon by 20-750 eV Xe ions has been studied with molecular dynamics. The nonlinear effects are dominant at 250 eV ion bombardment. They result in a partly amorphization of the impact volume as well as in a considerable reduction of the surface binding energy in this volume during the sputtering process.

AB - Elastic sputtering of crystalline xenon by 20-750 eV Xe ions has been studied with molecular dynamics. The nonlinear effects are dominant at 250 eV ion bombardment. They result in a partly amorphization of the impact volume as well as in a considerable reduction of the surface binding energy in this volume during the sputtering process.

KW - Optisk måleteknik og informationsbehandling; Optik og sensorsystemer

U2 - 10.1016/0168-583X(96)00176-0

DO - 10.1016/0168-583X(96)00176-0

M3 - Conference article

SN - 0168-583X

VL - 115

SP - 478

EP - 481

JO - Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms

IS - 1-4

T2 - 16th International Conference on Atomic Collisions in Solids (ICACS-16)

Y2 - 17 July 1995 through 21 July 1995

ER -

Linear and nonlinear effects at low energy ion bombardment of solid xenon

Abstract

Conference

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