Elastic sputtering of crystalline xenon by 20-750 eV Xe ions has been studied with molecular dynamics. The nonlinear effects are dominant at 250 eV ion bombardment. They result in a partly amorphization of the impact volume as well as in a considerable reduction of the surface binding energy in this volume during the sputtering process.
|Journal||Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms|
|Publication status||Published - 1996|
|Event||16th International Conference on Atomic Collisions in Solids (ICACS-16) - Linz, Austria|
Duration: 17 Jul 1995 → 21 Jul 1995
Conference number: 16
|Conference||16th International Conference on Atomic Collisions in Solids (ICACS-16)|
|Period||17/07/1995 → 21/07/1995|