Limiting Damage to 2D Materials during Focused Ion Beam Processing

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Abstract

Preparing exposed 2D material surfaces for atomic level cross‐sectional investigations requires surface damage to be minimized. This work presents a simple procedure for eliminating the surface damage, measurable with transmission electron microscopy, scanning transmission electron microscopy, and electron energy‐loss spectroscopy, during focused ion beam preparation of lamella of exposed MoS2 on gold using evaporated carbon.
Original languageEnglish
Article number2000318
JournalPhysica Status Solidi (b)
Volume257
Issue number12
Number of pages5
ISSN0370-1972
DOIs
Publication statusPublished - 2020

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