Limiting Damage to 2D Materials during Focused Ion Beam Processing

Research output: Contribution to journalJournal articleResearchpeer-review

5 Downloads (Pure)


Preparing exposed 2D material surfaces for atomic level cross‐sectional investigations requires surface damage to be minimized. This work presents a simple procedure for eliminating the surface damage, measurable with transmission electron microscopy, scanning transmission electron microscopy, and electron energy‐loss spectroscopy, during focused ion beam preparation of lamella of exposed MoS2 on gold using evaporated carbon.
Original languageEnglish
Article number2000318
JournalPhysica Status Solidi (b)
Issue number12
Number of pages5
Publication statusPublished - 2020


Dive into the research topics of 'Limiting Damage to 2D Materials during Focused Ion Beam Processing'. Together they form a unique fingerprint.

Cite this