Light emitting diodes as an alternative ambient illumination source in photolithography environment

Dennis Dan Corell; Haiyan Ou; Carsten Dam-Hansen; Paul Michael Petersen; Dan Friis

doi:10.1364/OE.17.017293

Light emitting diodes as an alternative ambient illumination source in photolithography environment

Dennis Dan Corell, Haiyan Ou, Carsten Dam-Hansen, Paul Michael Petersen, Dan Friis

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Abstract

We explored an alternative light emitting diode (LED) - based solution to replace the existing yellow fluorescent light tubes (YFT) used in photolithography rooms. A no-blue LED lamp was designed and a prototype was fabricated. For both solutions, the spectral power distribution (SPD) was measured, the colorimetric values were calculated, and a visual comparison using Gretagmacbeth colorcharts was performed. The visual comparison showed that the LED bulb was better to render colors despite a low color rendering index (CRI). Furthermore, the LED bulb was tested in a photolithography room and there was no exposure to the photoresist even after 168 hours illumination.

Original language	English
Journal	Optics Express
Volume	17
Issue number	20
Pages (from-to)	17293-17302
ISSN	1094-4087
DOIs	https://doi.org/10.1364/OE.17.017293
Publication status	Published - 2009

Bibliographical note

This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/oe/abstract.cfm?uri=oe-17-20-17293. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.

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title = "Light emitting diodes as an alternative ambient illumination source in photolithography environment",

abstract = "We explored an alternative light emitting diode (LED) - based solution to replace the existing yellow fluorescent light tubes (YFT) used in photolithography rooms. A no-blue LED lamp was designed and a prototype was fabricated. For both solutions, the spectral power distribution (SPD) was measured, the colorimetric values were calculated, and a visual comparison using Gretagmacbeth colorcharts was performed. The visual comparison showed that the LED bulb was better to render colors despite a low color rendering index (CRI). Furthermore, the LED bulb was tested in a photolithography room and there was no exposure to the photoresist even after 168 hours illumination.",

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T1 - Light emitting diodes as an alternative ambient illumination source in photolithography environment

AU - Corell, Dennis Dan

AU - Ou, Haiyan

AU - Dam-Hansen, Carsten

AU - Petersen, Paul Michael

AU - Friis, Dan

N1 - This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/oe/abstract.cfm?uri=oe-17-20-17293. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.

PY - 2009

Y1 - 2009

N2 - We explored an alternative light emitting diode (LED) - based solution to replace the existing yellow fluorescent light tubes (YFT) used in photolithography rooms. A no-blue LED lamp was designed and a prototype was fabricated. For both solutions, the spectral power distribution (SPD) was measured, the colorimetric values were calculated, and a visual comparison using Gretagmacbeth colorcharts was performed. The visual comparison showed that the LED bulb was better to render colors despite a low color rendering index (CRI). Furthermore, the LED bulb was tested in a photolithography room and there was no exposure to the photoresist even after 168 hours illumination.

AB - We explored an alternative light emitting diode (LED) - based solution to replace the existing yellow fluorescent light tubes (YFT) used in photolithography rooms. A no-blue LED lamp was designed and a prototype was fabricated. For both solutions, the spectral power distribution (SPD) was measured, the colorimetric values were calculated, and a visual comparison using Gretagmacbeth colorcharts was performed. The visual comparison showed that the LED bulb was better to render colors despite a low color rendering index (CRI). Furthermore, the LED bulb was tested in a photolithography room and there was no exposure to the photoresist even after 168 hours illumination.

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DO - 10.1364/OE.17.017293

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JF - Optics Express

IS - 20

ER -

Light emitting diodes as an alternative ambient illumination source in photolithography environment

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