Lift-off by local laser lithography for stamp manufacturing

Esko Sebastian Forsén, P. Carlberg, L. Montelius, Anja Boisen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the Second International Conference on Nanoimprint and Nanoprint Technology (NNT)
Place of Publication	Boston, MA, USA
Publication date	2003
Publication status	Published - 2003

OpenUrl availability

@inproceedings{b0d301dc39cc4e6b997252e21d8b524b,

title = "Lift-off by local laser lithography for stamp manufacturing",

author = "Fors{\'e}n, \{Esko Sebastian\} and P. Carlberg and L. Montelius and Anja Boisen",

year = "2003",

language = "English",

booktitle = "Proceedings of the Second International Conference on Nanoimprint and Nanoprint Technology (NNT)",

}