Lift-off by local laser lithography for stamp manufacturing

Esko Sebastian Forsén, P. Carlberg, L. Montelius, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the Second International Conference on Nanoimprint and Nanoprint Technology (NNT)
    Place of PublicationBoston, MA, USA
    Publication date2003
    Publication statusPublished - 2003

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